JPS54188B2 - - Google Patents
Info
- Publication number
- JPS54188B2 JPS54188B2 JP11182674A JP11182674A JPS54188B2 JP S54188 B2 JPS54188 B2 JP S54188B2 JP 11182674 A JP11182674 A JP 11182674A JP 11182674 A JP11182674 A JP 11182674A JP S54188 B2 JPS54188 B2 JP S54188B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11182674A JPS5139062A (ja) | 1974-09-28 | 1974-09-28 | Hikaridohakairosakuseihoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11182674A JPS5139062A (ja) | 1974-09-28 | 1974-09-28 | Hikaridohakairosakuseihoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5139062A JPS5139062A (ja) | 1976-04-01 |
| JPS54188B2 true JPS54188B2 (tr) | 1979-01-08 |
Family
ID=14571120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11182674A Granted JPS5139062A (ja) | 1974-09-28 | 1974-09-28 | Hikaridohakairosakuseihoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5139062A (tr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644281B2 (ja) * | 1983-03-18 | 1994-06-08 | 株式会社日立製作所 | パターン欠陥検査装置 |
| JP2636275B2 (ja) * | 1987-11-06 | 1997-07-30 | ミノルタ株式会社 | 光シャッタの製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4983460A (tr) * | 1972-12-13 | 1974-08-10 |
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1974
- 1974-09-28 JP JP11182674A patent/JPS5139062A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5139062A (ja) | 1976-04-01 |