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JPS5417075A - Humidity detecting element - Google Patents

Humidity detecting element

Info

Publication number
JPS5417075A
JPS5417075A JP8184577A JP8184577A JPS5417075A JP S5417075 A JPS5417075 A JP S5417075A JP 8184577 A JP8184577 A JP 8184577A JP 8184577 A JP8184577 A JP 8184577A JP S5417075 A JPS5417075 A JP S5417075A
Authority
JP
Japan
Prior art keywords
detecting element
humidity detecting
film
humidity
detectgn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8184577A
Other languages
Japanese (ja)
Other versions
JPS6140124B2 (en
Inventor
Akihiko Yoshida
Atsushi Nishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8184577A priority Critical patent/JPS5417075A/en
Priority to AU36668/78A priority patent/AU501488B1/en
Priority to DE2824609A priority patent/DE2824609C2/en
Priority to US05/912,714 priority patent/US4217623A/en
Priority to CA304,798A priority patent/CA1116237A/en
Priority to GB7826328A priority patent/GB2000292B/en
Publication of JPS5417075A publication Critical patent/JPS5417075A/en
Publication of JPS6140124B2 publication Critical patent/JPS6140124B2/ja
Granted legal-status Critical Current

Links

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE: To provide a humidity detectgn element, which is small in size for easy handling and stable in characteristics, by specifying the contacting area between an anode oxidized film of a dielectric substance such as a valve metal and metal oxide film of semiconductor covering the former film.
COPYRIGHT: (C)1979,JPO&Japio
JP8184577A 1977-06-06 1977-07-07 Humidity detecting element Granted JPS5417075A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP8184577A JPS5417075A (en) 1977-07-07 1977-07-07 Humidity detecting element
AU36668/78A AU501488B1 (en) 1977-06-06 1978-05-30 Humidity sensor
DE2824609A DE2824609C2 (en) 1977-06-06 1978-06-05 Device for measuring humidity by changing electrostatic capacitance
US05/912,714 US4217623A (en) 1977-06-06 1978-06-05 Humidity sensor of capacitance change type
CA304,798A CA1116237A (en) 1977-06-06 1978-06-05 Humidity sensor of capacitance change type
GB7826328A GB2000292B (en) 1977-06-06 1978-06-05 Humidity sensor of capacitance change type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8184577A JPS5417075A (en) 1977-07-07 1977-07-07 Humidity detecting element

Publications (2)

Publication Number Publication Date
JPS5417075A true JPS5417075A (en) 1979-02-08
JPS6140124B2 JPS6140124B2 (en) 1986-09-08

Family

ID=13757804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8184577A Granted JPS5417075A (en) 1977-06-06 1977-07-07 Humidity detecting element

Country Status (1)

Country Link
JP (1) JPS5417075A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54135990U (en) * 1978-03-14 1979-09-20
JPS5710202A (en) * 1980-06-20 1982-01-19 Matsushita Electric Ind Co Ltd Moisture detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54135990U (en) * 1978-03-14 1979-09-20
JPS5710202A (en) * 1980-06-20 1982-01-19 Matsushita Electric Ind Co Ltd Moisture detector
JPH0114536B2 (en) * 1980-06-20 1989-03-13 Matsushita Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS6140124B2 (en) 1986-09-08

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