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JPS54163682A - Washing device - Google Patents

Washing device

Info

Publication number
JPS54163682A
JPS54163682A JP7298778A JP7298778A JPS54163682A JP S54163682 A JPS54163682 A JP S54163682A JP 7298778 A JP7298778 A JP 7298778A JP 7298778 A JP7298778 A JP 7298778A JP S54163682 A JPS54163682 A JP S54163682A
Authority
JP
Japan
Prior art keywords
washing device
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7298778A
Other languages
Japanese (ja)
Inventor
Tatsurou Sakai
Shiyunji Nakao
Shigeji Obara
Shingo Yanagihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7298778A priority Critical patent/JPS54163682A/en
Publication of JPS54163682A publication Critical patent/JPS54163682A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP7298778A 1978-06-15 1978-06-15 Washing device Pending JPS54163682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7298778A JPS54163682A (en) 1978-06-15 1978-06-15 Washing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7298778A JPS54163682A (en) 1978-06-15 1978-06-15 Washing device

Publications (1)

Publication Number Publication Date
JPS54163682A true JPS54163682A (en) 1979-12-26

Family

ID=13505245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7298778A Pending JPS54163682A (en) 1978-06-15 1978-06-15 Washing device

Country Status (1)

Country Link
JP (1) JPS54163682A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501257A (en) * 1980-03-06 1982-07-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501257A (en) * 1980-03-06 1982-07-15

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