JPS54162969U - - Google Patents
Info
- Publication number
- JPS54162969U JPS54162969U JP6037378U JP6037378U JPS54162969U JP S54162969 U JPS54162969 U JP S54162969U JP 6037378 U JP6037378 U JP 6037378U JP 6037378 U JP6037378 U JP 6037378U JP S54162969 U JPS54162969 U JP S54162969U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6037378U JPS54162969U (en) | 1978-05-04 | 1978-05-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6037378U JPS54162969U (en) | 1978-05-04 | 1978-05-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54162969U true JPS54162969U (en) | 1979-11-14 |
Family
ID=28960837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6037378U Pending JPS54162969U (en) | 1978-05-04 | 1978-05-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54162969U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
| US9127362B2 (en) | 2005-10-31 | 2015-09-08 | Applied Materials, Inc. | Process kit and target for substrate processing chamber |
| US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
-
1978
- 1978-05-04 JP JP6037378U patent/JPS54162969U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
| US9127362B2 (en) | 2005-10-31 | 2015-09-08 | Applied Materials, Inc. | Process kit and target for substrate processing chamber |
| US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |