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JPS5416183A - Probe card - Google Patents

Probe card

Info

Publication number
JPS5416183A
JPS5416183A JP8119977A JP8119977A JPS5416183A JP S5416183 A JPS5416183 A JP S5416183A JP 8119977 A JP8119977 A JP 8119977A JP 8119977 A JP8119977 A JP 8119977A JP S5416183 A JPS5416183 A JP S5416183A
Authority
JP
Japan
Prior art keywords
probe card
printing
anisttropic
styli
multiplicity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8119977A
Other languages
Japanese (ja)
Inventor
Kazuharu Saito
Yoshiaki Shiraishi
Nobuhiko Ito
Fumio Nakazawa
Seiji Noda
Mitsutaka Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP8119977A priority Critical patent/JPS5416183A/en
Publication of JPS5416183A publication Critical patent/JPS5416183A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To obtain an inexpensive and easy-to-produce probe card by printing and forming a multiplicity of styli through screen printing at high accuracy and using anisttropic conductive rubber having conductivity only in the thickness direction for contact with IC electrodes.
COPYRIGHT: (C)1979,JPO&Japio
JP8119977A 1977-07-07 1977-07-07 Probe card Pending JPS5416183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8119977A JPS5416183A (en) 1977-07-07 1977-07-07 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8119977A JPS5416183A (en) 1977-07-07 1977-07-07 Probe card

Publications (1)

Publication Number Publication Date
JPS5416183A true JPS5416183A (en) 1979-02-06

Family

ID=13739795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8119977A Pending JPS5416183A (en) 1977-07-07 1977-07-07 Probe card

Country Status (1)

Country Link
JP (1) JPS5416183A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5911640A (en) * 1982-07-12 1984-01-21 Mitsubishi Electric Corp Probe card for test of wafer
JPH04345046A (en) * 1991-05-03 1992-12-01 Samsung Electron Co Ltd Chip life test apparatus for semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5911640A (en) * 1982-07-12 1984-01-21 Mitsubishi Electric Corp Probe card for test of wafer
JPH04345046A (en) * 1991-05-03 1992-12-01 Samsung Electron Co Ltd Chip life test apparatus for semiconductor device

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