JPS54145565A - Position detecting method - Google Patents
Position detecting methodInfo
- Publication number
- JPS54145565A JPS54145565A JP5377478A JP5377478A JPS54145565A JP S54145565 A JPS54145565 A JP S54145565A JP 5377478 A JP5377478 A JP 5377478A JP 5377478 A JP5377478 A JP 5377478A JP S54145565 A JPS54145565 A JP S54145565A
- Authority
- JP
- Japan
- Prior art keywords
- coordinates
- coordinate
- formulas
- position detecting
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE: To reduce the time required for detection by so constituting positions marks that the coordinates X, Y of alignment marks mutually associate and obtaining the coordinates of positions only through scanning of the coordinates in one direction of X or Y.
CONSTITUTION: Alignment marks 12a... 12d of isosceles triangle are used for a substrate 11. If the two intersection points of an isosceles triangle 12 and a beam scanning line 13 are let to be α1, α2 respectively (XB denotes the x coordinate of the beam scanning lines), the coordinates X, Y are given by formulas [1], [2]. As are evident from these formulas, the coordinate X is measured with errors half those of the coordinate Y as against measurement errors of α2, α1. Hence, as the inclination of the two sides of the triangle is made steeper, the values of the coordinate X of better accuracy are obtained. Since the two coordinates of X, Y are obtained simply through scanning in one direction, the position detecting time may be reduced to 1/2 that of ordinary ones.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5377478A JPS54145565A (en) | 1978-05-08 | 1978-05-08 | Position detecting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5377478A JPS54145565A (en) | 1978-05-08 | 1978-05-08 | Position detecting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54145565A true JPS54145565A (en) | 1979-11-13 |
Family
ID=12952154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5377478A Pending JPS54145565A (en) | 1978-05-08 | 1978-05-08 | Position detecting method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54145565A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108571939A (en) * | 2018-04-24 | 2018-09-25 | 宁波江丰电子材料股份有限公司 | Positioning device and three-coordinates measuring machine |
-
1978
- 1978-05-08 JP JP5377478A patent/JPS54145565A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108571939A (en) * | 2018-04-24 | 2018-09-25 | 宁波江丰电子材料股份有限公司 | Positioning device and three-coordinates measuring machine |
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