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JPS54136908A - Device for development and etching - Google Patents

Device for development and etching

Info

Publication number
JPS54136908A
JPS54136908A JP4322778A JP4322778A JPS54136908A JP S54136908 A JPS54136908 A JP S54136908A JP 4322778 A JP4322778 A JP 4322778A JP 4322778 A JP4322778 A JP 4322778A JP S54136908 A JPS54136908 A JP S54136908A
Authority
JP
Japan
Prior art keywords
etching
development
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4322778A
Other languages
Japanese (ja)
Inventor
Nobuo Satou
Yoshiharu Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4322778A priority Critical patent/JPS54136908A/en
Publication of JPS54136908A publication Critical patent/JPS54136908A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photographic Processing Devices Using Wet Methods (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP4322778A 1978-04-14 1978-04-14 Device for development and etching Pending JPS54136908A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4322778A JPS54136908A (en) 1978-04-14 1978-04-14 Device for development and etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4322778A JPS54136908A (en) 1978-04-14 1978-04-14 Device for development and etching

Publications (1)

Publication Number Publication Date
JPS54136908A true JPS54136908A (en) 1979-10-24

Family

ID=12658019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4322778A Pending JPS54136908A (en) 1978-04-14 1978-04-14 Device for development and etching

Country Status (1)

Country Link
JP (1) JPS54136908A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57129437A (en) * 1981-02-04 1982-08-11 Toray Ind Inc Method for developing photosensitive resin film
JPS5866939A (en) * 1981-10-16 1983-04-21 Fujitsu Ltd Inside Fujitsu Limited, 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture
JPS6238457A (en) * 1985-08-14 1987-02-19 Asahi Chem Ind Co Ltd Method for developing resist
JP2002015752A (en) * 2000-06-30 2002-01-18 Aisin Takaoka Ltd Method and apparatus for manufacturing fuel cell separator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57129437A (en) * 1981-02-04 1982-08-11 Toray Ind Inc Method for developing photosensitive resin film
JPS5866939A (en) * 1981-10-16 1983-04-21 Fujitsu Ltd Inside Fujitsu Limited, 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture
JPS6238457A (en) * 1985-08-14 1987-02-19 Asahi Chem Ind Co Ltd Method for developing resist
JP2002015752A (en) * 2000-06-30 2002-01-18 Aisin Takaoka Ltd Method and apparatus for manufacturing fuel cell separator

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