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JPS54100266A - Defective mark decision method - Google Patents

Defective mark decision method

Info

Publication number
JPS54100266A
JPS54100266A JP621678A JP621678A JPS54100266A JP S54100266 A JPS54100266 A JP S54100266A JP 621678 A JP621678 A JP 621678A JP 621678 A JP621678 A JP 621678A JP S54100266 A JPS54100266 A JP S54100266A
Authority
JP
Japan
Prior art keywords
mark
product
grain
laser beam
decided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP621678A
Other languages
Japanese (ja)
Inventor
Hiroshi Takao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP621678A priority Critical patent/JPS54100266A/en
Publication of JPS54100266A publication Critical patent/JPS54100266A/en
Pending legal-status Critical Current

Links

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  • Image Analysis (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)

Abstract

PURPOSE: To mark surface is scanned in several steps by the laser beam to count the number of the region which has the different light volume from the grain of the product and then to be compared with the preset value. When a coincidence is obtained from the comparison, the mark is decided nondefective.
CONSTITUTION: Gas laser beam 3 is produced by oscillating He/Ne charge/discharge tube 3; the mark surface of product 5 is irradiated via mirror 4; and the photoelectric conversion is given to the reflected light by photo transistor 6. In this case, the volume of the reflected light from the mark differs from that of the grain of the product, and so the information is binary-coded with a fixed threshold value. The mark gradation can be limited by setting both the upper and lower limit levels to the threshold value. The signal of element 6 is amplified 7 and then binary-coded through qiantizer 8. The laser beam is scanned in the upper, middle and lower steps each and along the mark array direction. And the number of the region which has the fifferent light volume from the product's grain. When the numner of the region differs from the reference number, the mark is decided defective to disuse product 5. In such constitution, the mark can be decided automatically, thus enhancing the reliability.
COPYRIGHT: (C)1979,JPO&Japio
JP621678A 1978-01-25 1978-01-25 Defective mark decision method Pending JPS54100266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP621678A JPS54100266A (en) 1978-01-25 1978-01-25 Defective mark decision method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP621678A JPS54100266A (en) 1978-01-25 1978-01-25 Defective mark decision method

Publications (1)

Publication Number Publication Date
JPS54100266A true JPS54100266A (en) 1979-08-07

Family

ID=11632320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP621678A Pending JPS54100266A (en) 1978-01-25 1978-01-25 Defective mark decision method

Country Status (1)

Country Link
JP (1) JPS54100266A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63229570A (en) * 1987-03-19 1988-09-26 Fujitsu Ltd pattern inspection equipment
JPH0232168U (en) * 1988-08-12 1990-02-28

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091395A (en) * 1973-12-13 1975-07-22
JPS5236507U (en) * 1975-09-04 1977-03-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091395A (en) * 1973-12-13 1975-07-22
JPS5236507U (en) * 1975-09-04 1977-03-15

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63229570A (en) * 1987-03-19 1988-09-26 Fujitsu Ltd pattern inspection equipment
JPH0532791B2 (en) * 1987-03-19 1993-05-17 Fujitsu Ltd
JPH0232168U (en) * 1988-08-12 1990-02-28

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