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JPS5394872A - Fixing supporter for molecule beam evaporation source cell - Google Patents

Fixing supporter for molecule beam evaporation source cell

Info

Publication number
JPS5394872A
JPS5394872A JP1005277A JP1005277A JPS5394872A JP S5394872 A JPS5394872 A JP S5394872A JP 1005277 A JP1005277 A JP 1005277A JP 1005277 A JP1005277 A JP 1005277A JP S5394872 A JPS5394872 A JP S5394872A
Authority
JP
Japan
Prior art keywords
evaporation source
source cell
beam evaporation
fixing supporter
molecule beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1005277A
Other languages
Japanese (ja)
Inventor
Takuji Shimanoe
Toshio Murotani
Kazuaki Segawa
Hidejiro Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1005277A priority Critical patent/JPS5394872A/en
Publication of JPS5394872A publication Critical patent/JPS5394872A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To form an evaporation source cell fixing supporter preventing the molecule beam contamination caused by the discharge gas given from the high temperature part, by providing a heater outside the cell holding container being covered with a heat shielding cylinder and also providing a thermocouple insertion hole on the bottom surface.
COPYRIGHT: (C)1978,JPO&Japio
JP1005277A 1977-01-31 1977-01-31 Fixing supporter for molecule beam evaporation source cell Pending JPS5394872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1005277A JPS5394872A (en) 1977-01-31 1977-01-31 Fixing supporter for molecule beam evaporation source cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1005277A JPS5394872A (en) 1977-01-31 1977-01-31 Fixing supporter for molecule beam evaporation source cell

Publications (1)

Publication Number Publication Date
JPS5394872A true JPS5394872A (en) 1978-08-19

Family

ID=11739615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1005277A Pending JPS5394872A (en) 1977-01-31 1977-01-31 Fixing supporter for molecule beam evaporation source cell

Country Status (1)

Country Link
JP (1) JPS5394872A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60264396A (en) * 1984-06-11 1985-12-27 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン Device for heating molecular beam epitaxy furnace
JPS61236112A (en) * 1985-04-12 1986-10-21 Hitachi Ltd Source of molecular beam
JPS63115209U (en) * 1987-01-20 1988-07-25
JPH0413056U (en) * 1990-05-14 1992-02-03

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60264396A (en) * 1984-06-11 1985-12-27 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン Device for heating molecular beam epitaxy furnace
JPH0357073B2 (en) * 1984-06-11 1991-08-30
JPS61236112A (en) * 1985-04-12 1986-10-21 Hitachi Ltd Source of molecular beam
JPH0318735B2 (en) * 1985-04-12 1991-03-13 Hitachi Ltd
JPS63115209U (en) * 1987-01-20 1988-07-25
JPH0413056U (en) * 1990-05-14 1992-02-03

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