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JPS5394865A - Solid scanning electronic microscope - Google Patents

Solid scanning electronic microscope

Info

Publication number
JPS5394865A
JPS5394865A JP951177A JP951177A JPS5394865A JP S5394865 A JPS5394865 A JP S5394865A JP 951177 A JP951177 A JP 951177A JP 951177 A JP951177 A JP 951177A JP S5394865 A JPS5394865 A JP S5394865A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
solid scanning
solid
solid image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP951177A
Other languages
Japanese (ja)
Other versions
JPS5824727B2 (en
Inventor
Morihiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP52009511A priority Critical patent/JPS5824727B2/en
Publication of JPS5394865A publication Critical patent/JPS5394865A/en
Publication of JPS5824727B2 publication Critical patent/JPS5824727B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To obtain a cross section in the depth direction for a solid image through measurement of an optional point in the image as well as to secure the drawing of a controurpattern or the calculation of the solid image volume by counpling to the electronic computers.
COPYRIGHT: (C)1978,JPO&Japio
JP52009511A 1977-01-31 1977-01-31 Stereo scanning electron microscope Expired JPS5824727B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52009511A JPS5824727B2 (en) 1977-01-31 1977-01-31 Stereo scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52009511A JPS5824727B2 (en) 1977-01-31 1977-01-31 Stereo scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5394865A true JPS5394865A (en) 1978-08-19
JPS5824727B2 JPS5824727B2 (en) 1983-05-23

Family

ID=11722260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52009511A Expired JPS5824727B2 (en) 1977-01-31 1977-01-31 Stereo scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5824727B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101954U (en) * 1984-12-11 1986-06-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101954U (en) * 1984-12-11 1986-06-28

Also Published As

Publication number Publication date
JPS5824727B2 (en) 1983-05-23

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