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JPS5394780A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5394780A
JPS5394780A JP239577A JP239577A JPS5394780A JP S5394780 A JPS5394780 A JP S5394780A JP 239577 A JP239577 A JP 239577A JP 239577 A JP239577 A JP 239577A JP S5394780 A JPS5394780 A JP S5394780A
Authority
JP
Japan
Prior art keywords
electrode
manufacture
semiconductor device
substrate
layer side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP239577A
Other languages
Japanese (ja)
Inventor
Yasuo Wada
Hideo Sunami
Shigeru Nishimatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP239577A priority Critical patent/JPS5394780A/en
Publication of JPS5394780A publication Critical patent/JPS5394780A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To obtain the excellent dielectric strength characteristics multi-layer electrode by using the part where the 1st electrode of the high-temperature heat-oxidized film, interposed between a Si substrate and the 1st electrode at the lower layer side, for insulation between the 2nd electrode at the upper layer side and substrate.
JP239577A 1977-01-14 1977-01-14 Manufacture of semiconductor device Pending JPS5394780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP239577A JPS5394780A (en) 1977-01-14 1977-01-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP239577A JPS5394780A (en) 1977-01-14 1977-01-14 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5394780A true JPS5394780A (en) 1978-08-19

Family

ID=11528041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP239577A Pending JPS5394780A (en) 1977-01-14 1977-01-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5394780A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814537A (en) * 1981-07-17 1983-01-27 Nec Corp Manufacture of semiconductor device
JPS5867046A (en) * 1981-10-19 1983-04-21 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5889869A (en) * 1981-11-20 1983-05-28 Matsushita Electronics Corp Manufacture of semiconductor device
JPS6052059A (en) * 1983-08-31 1985-03-23 Toshiba Corp Manufacture of semiconductor device
JPS62139343A (en) * 1985-12-13 1987-06-23 Nec Corp Manufacture of semiconductor device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814537A (en) * 1981-07-17 1983-01-27 Nec Corp Manufacture of semiconductor device
JPS6351375B2 (en) * 1981-07-17 1988-10-13 Nippon Electric Co
JPS5867046A (en) * 1981-10-19 1983-04-21 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5889869A (en) * 1981-11-20 1983-05-28 Matsushita Electronics Corp Manufacture of semiconductor device
JPS6312389B2 (en) * 1981-11-20 1988-03-18 Matsushita Electronics Corp
JPS6052059A (en) * 1983-08-31 1985-03-23 Toshiba Corp Manufacture of semiconductor device
JPS62139343A (en) * 1985-12-13 1987-06-23 Nec Corp Manufacture of semiconductor device

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