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JPS5389460A - Measuring method of relative position deviation - Google Patents

Measuring method of relative position deviation

Info

Publication number
JPS5389460A
JPS5389460A JP422577A JP422577A JPS5389460A JP S5389460 A JPS5389460 A JP S5389460A JP 422577 A JP422577 A JP 422577A JP 422577 A JP422577 A JP 422577A JP S5389460 A JPS5389460 A JP S5389460A
Authority
JP
Japan
Prior art keywords
relative position
measuring method
position deviation
aligmment
magnitudes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP422577A
Other languages
Japanese (ja)
Other versions
JPS5953482B2 (en
Inventor
Masao Hiyane
Yoshiro Fushida
Miyao Oda
Yasunao Saito
Misao Sekimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP422577A priority Critical patent/JPS5953482B2/en
Publication of JPS5389460A publication Critical patent/JPS5389460A/en
Publication of JPS5953482B2 publication Critical patent/JPS5953482B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure relative position deviations readily and at high accuracy of measurement by withdrawing the differences of the magnitudes of the signals corresponding to the distances between end parts of both members at the time of performing position aligmment of a mask and the object to be exposed in an exposure process.
COPYRIGHT: (C)1978,JPO&Japio
JP422577A 1977-01-18 1977-01-18 Relative position deviation measurement method Expired JPS5953482B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP422577A JPS5953482B2 (en) 1977-01-18 1977-01-18 Relative position deviation measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP422577A JPS5953482B2 (en) 1977-01-18 1977-01-18 Relative position deviation measurement method

Publications (2)

Publication Number Publication Date
JPS5389460A true JPS5389460A (en) 1978-08-07
JPS5953482B2 JPS5953482B2 (en) 1984-12-25

Family

ID=11578634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP422577A Expired JPS5953482B2 (en) 1977-01-18 1977-01-18 Relative position deviation measurement method

Country Status (1)

Country Link
JP (1) JPS5953482B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256002A (en) * 1984-06-01 1985-12-17 Nippon Kogaku Kk <Nikon> Position detecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256002A (en) * 1984-06-01 1985-12-17 Nippon Kogaku Kk <Nikon> Position detecting apparatus

Also Published As

Publication number Publication date
JPS5953482B2 (en) 1984-12-25

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