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JPS5384458A - Vapor growth method - Google Patents

Vapor growth method

Info

Publication number
JPS5384458A
JPS5384458A JP15948076A JP15948076A JPS5384458A JP S5384458 A JPS5384458 A JP S5384458A JP 15948076 A JP15948076 A JP 15948076A JP 15948076 A JP15948076 A JP 15948076A JP S5384458 A JPS5384458 A JP S5384458A
Authority
JP
Japan
Prior art keywords
growth method
vapor growth
spacer
installation
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15948076A
Other languages
Japanese (ja)
Other versions
JPS59967B2 (en
Inventor
Akira Miura
Tsutomu Kiyono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15948076A priority Critical patent/JPS59967B2/en
Publication of JPS5384458A publication Critical patent/JPS5384458A/en
Publication of JPS59967B2 publication Critical patent/JPS59967B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45585—Compression of gas before it reaches the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To carry out a uniform vapor epitaxial growth by adjusting the flow velocity distribution of the reaction gas flow with installation of a spacer into the reaction tube.
JP15948076A 1976-12-29 1976-12-29 Vapor phase growth method Expired JPS59967B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15948076A JPS59967B2 (en) 1976-12-29 1976-12-29 Vapor phase growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15948076A JPS59967B2 (en) 1976-12-29 1976-12-29 Vapor phase growth method

Publications (2)

Publication Number Publication Date
JPS5384458A true JPS5384458A (en) 1978-07-25
JPS59967B2 JPS59967B2 (en) 1984-01-10

Family

ID=15694683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15948076A Expired JPS59967B2 (en) 1976-12-29 1976-12-29 Vapor phase growth method

Country Status (1)

Country Link
JP (1) JPS59967B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110047973A (en) * 2019-04-23 2019-07-23 北京蜃景光电科技有限公司 A kind of photoelectric sensor and preparation method thereof based on Copper-cladding Aluminum Bar cadmium sulfide nano wires

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110047973A (en) * 2019-04-23 2019-07-23 北京蜃景光电科技有限公司 A kind of photoelectric sensor and preparation method thereof based on Copper-cladding Aluminum Bar cadmium sulfide nano wires
CN110047973B (en) * 2019-04-23 2020-05-01 范佳旭 Photoelectric sensor based on copper-doped cadmium sulfide nanowire and preparation method thereof

Also Published As

Publication number Publication date
JPS59967B2 (en) 1984-01-10

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