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JPS5380965A - Liquid-phase growth method - Google Patents

Liquid-phase growth method

Info

Publication number
JPS5380965A
JPS5380965A JP15622876A JP15622876A JPS5380965A JP S5380965 A JPS5380965 A JP S5380965A JP 15622876 A JP15622876 A JP 15622876A JP 15622876 A JP15622876 A JP 15622876A JP S5380965 A JPS5380965 A JP S5380965A
Authority
JP
Japan
Prior art keywords
liquid
growth method
phase growth
dropping
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15622876A
Other languages
Japanese (ja)
Inventor
Makoto Naito
Tetsuo Sekiwa
Tadashi Komatsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15622876A priority Critical patent/JPS5380965A/en
Publication of JPS5380965A publication Critical patent/JPS5380965A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To produce a uniform and good-quality growing layer by dropping the solution onto the substrate from the gap at the bottom part of the solution tank.
COPYRIGHT: (C)1978,JPO&Japio
JP15622876A 1976-12-27 1976-12-27 Liquid-phase growth method Pending JPS5380965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15622876A JPS5380965A (en) 1976-12-27 1976-12-27 Liquid-phase growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15622876A JPS5380965A (en) 1976-12-27 1976-12-27 Liquid-phase growth method

Publications (1)

Publication Number Publication Date
JPS5380965A true JPS5380965A (en) 1978-07-17

Family

ID=15623150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15622876A Pending JPS5380965A (en) 1976-12-27 1976-12-27 Liquid-phase growth method

Country Status (1)

Country Link
JP (1) JPS5380965A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797621A (en) * 1980-12-10 1982-06-17 Mitsubishi Electric Corp Boat for liquid phase epitaxial growth

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797621A (en) * 1980-12-10 1982-06-17 Mitsubishi Electric Corp Boat for liquid phase epitaxial growth

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