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JPS5379389A - Heat treatment apparatus for mos - Google Patents

Heat treatment apparatus for mos

Info

Publication number
JPS5379389A
JPS5379389A JP15494776A JP15494776A JPS5379389A JP S5379389 A JPS5379389 A JP S5379389A JP 15494776 A JP15494776 A JP 15494776A JP 15494776 A JP15494776 A JP 15494776A JP S5379389 A JPS5379389 A JP S5379389A
Authority
JP
Japan
Prior art keywords
mos
heat treatment
treatment apparatus
specimens
blowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15494776A
Other languages
Japanese (ja)
Other versions
JPS5410830B2 (en
Inventor
Kazuyuki Saito
Michiyuki Harada
Katsumi Murase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP15494776A priority Critical patent/JPS5379389A/en
Publication of JPS5379389A publication Critical patent/JPS5379389A/en
Publication of JPS5410830B2 publication Critical patent/JPS5410830B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To prevent oxidation of specimens by extending the open end side of a quartz reaction tube and blowing a non-oxidative gas also through the extended portion.
COPYRIGHT: (C)1978,JPO&Japio
JP15494776A 1976-12-24 1976-12-24 Heat treatment apparatus for mos Granted JPS5379389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15494776A JPS5379389A (en) 1976-12-24 1976-12-24 Heat treatment apparatus for mos

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15494776A JPS5379389A (en) 1976-12-24 1976-12-24 Heat treatment apparatus for mos

Publications (2)

Publication Number Publication Date
JPS5379389A true JPS5379389A (en) 1978-07-13
JPS5410830B2 JPS5410830B2 (en) 1979-05-10

Family

ID=15595391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15494776A Granted JPS5379389A (en) 1976-12-24 1976-12-24 Heat treatment apparatus for mos

Country Status (1)

Country Link
JP (1) JPS5379389A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190949A (en) * 1985-02-19 1986-08-25 Rohm Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190949A (en) * 1985-02-19 1986-08-25 Rohm Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5410830B2 (en) 1979-05-10

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