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JPS5376179A - Forming method for oxide film - Google Patents

Forming method for oxide film

Info

Publication number
JPS5376179A
JPS5376179A JP15232476A JP15232476A JPS5376179A JP S5376179 A JPS5376179 A JP S5376179A JP 15232476 A JP15232476 A JP 15232476A JP 15232476 A JP15232476 A JP 15232476A JP S5376179 A JPS5376179 A JP S5376179A
Authority
JP
Japan
Prior art keywords
oxide film
forming method
electric conductive
conductive film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15232476A
Other languages
Japanese (ja)
Inventor
Tanimasa Akiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15232476A priority Critical patent/JPS5376179A/en
Publication of JPS5376179A publication Critical patent/JPS5376179A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent a decoloration of an electric conductive film and form a film with good quality, by spattering on a substrate, on which the transparent electric conductive film is formed, in the state that the transparent electric conductive film and a mask are insulated electrically, to form an oxide film.
COPYRIGHT: (C)1978,JPO&Japio
JP15232476A 1976-12-17 1976-12-17 Forming method for oxide film Pending JPS5376179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15232476A JPS5376179A (en) 1976-12-17 1976-12-17 Forming method for oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15232476A JPS5376179A (en) 1976-12-17 1976-12-17 Forming method for oxide film

Publications (1)

Publication Number Publication Date
JPS5376179A true JPS5376179A (en) 1978-07-06

Family

ID=15538029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15232476A Pending JPS5376179A (en) 1976-12-17 1976-12-17 Forming method for oxide film

Country Status (1)

Country Link
JP (1) JPS5376179A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014019891A (en) * 2012-07-17 2014-02-03 Ulvac Japan Ltd Method of producing dielectric film, method of producing thin-film secondary battery and dielectric film forming apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014019891A (en) * 2012-07-17 2014-02-03 Ulvac Japan Ltd Method of producing dielectric film, method of producing thin-film secondary battery and dielectric film forming apparatus

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