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JPS5373154A - Electrostatic capacity type displacement detector - Google Patents

Electrostatic capacity type displacement detector

Info

Publication number
JPS5373154A
JPS5373154A JP14905076A JP14905076A JPS5373154A JP S5373154 A JPS5373154 A JP S5373154A JP 14905076 A JP14905076 A JP 14905076A JP 14905076 A JP14905076 A JP 14905076A JP S5373154 A JPS5373154 A JP S5373154A
Authority
JP
Japan
Prior art keywords
electrostatic capacity
displacement detector
capacity type
type displacement
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14905076A
Other languages
Japanese (ja)
Inventor
Hitoshi Masaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP14905076A priority Critical patent/JPS5373154A/en
Publication of JPS5373154A publication Critical patent/JPS5373154A/en
Pending legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP14905076A 1976-12-10 1976-12-10 Electrostatic capacity type displacement detector Pending JPS5373154A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14905076A JPS5373154A (en) 1976-12-10 1976-12-10 Electrostatic capacity type displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14905076A JPS5373154A (en) 1976-12-10 1976-12-10 Electrostatic capacity type displacement detector

Publications (1)

Publication Number Publication Date
JPS5373154A true JPS5373154A (en) 1978-06-29

Family

ID=15466545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14905076A Pending JPS5373154A (en) 1976-12-10 1976-12-10 Electrostatic capacity type displacement detector

Country Status (1)

Country Link
JP (1) JPS5373154A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934850A (en) * 1972-07-24 1974-03-30
JPS4966155A (en) * 1972-09-07 1974-06-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934850A (en) * 1972-07-24 1974-03-30
JPS4966155A (en) * 1972-09-07 1974-06-26

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