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JPS5351965A - Semiconductor unit - Google Patents

Semiconductor unit

Info

Publication number
JPS5351965A
JPS5351965A JP12609576A JP12609576A JPS5351965A JP S5351965 A JPS5351965 A JP S5351965A JP 12609576 A JP12609576 A JP 12609576A JP 12609576 A JP12609576 A JP 12609576A JP S5351965 A JPS5351965 A JP S5351965A
Authority
JP
Japan
Prior art keywords
semiconductor unit
electrode
psg
tri
circumference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12609576A
Other languages
Japanese (ja)
Inventor
Yuji Hara
Tatsu Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12609576A priority Critical patent/JPS5351965A/en
Publication of JPS5351965A publication Critical patent/JPS5351965A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To manufacture the tri-metal electrode with high reliability, by providing the superposed film of PSG and si3n4 at the circumference of the window for electrode.
COPYRIGHT: (C)1978,JPO&Japio
JP12609576A 1976-10-22 1976-10-22 Semiconductor unit Pending JPS5351965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12609576A JPS5351965A (en) 1976-10-22 1976-10-22 Semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12609576A JPS5351965A (en) 1976-10-22 1976-10-22 Semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5351965A true JPS5351965A (en) 1978-05-11

Family

ID=14926471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12609576A Pending JPS5351965A (en) 1976-10-22 1976-10-22 Semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5351965A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582436A (en) * 1978-12-15 1980-06-21 Nippon Denso Co Ltd Manufacture of semiconductor device
US6658731B1 (en) * 2000-11-01 2003-12-09 Visteon Global Technologies, Inc. Method for fabricating connectors for interconnecting etched tri-metal circuit structures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582436A (en) * 1978-12-15 1980-06-21 Nippon Denso Co Ltd Manufacture of semiconductor device
US6658731B1 (en) * 2000-11-01 2003-12-09 Visteon Global Technologies, Inc. Method for fabricating connectors for interconnecting etched tri-metal circuit structures

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