JPS5339057A - Production of semiconductor single crystal - Google Patents
Production of semiconductor single crystalInfo
- Publication number
- JPS5339057A JPS5339057A JP11396776A JP11396776A JPS5339057A JP S5339057 A JPS5339057 A JP S5339057A JP 11396776 A JP11396776 A JP 11396776A JP 11396776 A JP11396776 A JP 11396776A JP S5339057 A JPS5339057 A JP S5339057A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- production
- semiconductor single
- inert gas
- bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000011261 inert gas Substances 0.000 abstract 2
- 238000007664 blowing Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000010791 quenching Methods 0.000 abstract 1
- 230000000171 quenching effect Effects 0.000 abstract 1
- 238000004857 zone melting Methods 0.000 abstract 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To minimize the propagation of dislocations by stopping heating the single crystal semiconductor bar having been obtianed at the time of converting multicrystalline semiconductor bar to single crystal by a zone melting method within an inert gas atmosphere, thereafter immediately quenching the bar by blowing an inert gas within the same apparatus.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11396776A JPS5339057A (en) | 1976-09-22 | 1976-09-22 | Production of semiconductor single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11396776A JPS5339057A (en) | 1976-09-22 | 1976-09-22 | Production of semiconductor single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5339057A true JPS5339057A (en) | 1978-04-10 |
Family
ID=14625686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11396776A Pending JPS5339057A (en) | 1976-09-22 | 1976-09-22 | Production of semiconductor single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5339057A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109778313A (en) * | 2017-11-13 | 2019-05-21 | 胜高股份有限公司 | The manufacturing device and manufacturing method of silicon single crystal |
-
1976
- 1976-09-22 JP JP11396776A patent/JPS5339057A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109778313A (en) * | 2017-11-13 | 2019-05-21 | 胜高股份有限公司 | The manufacturing device and manufacturing method of silicon single crystal |
JP2019089668A (en) * | 2017-11-13 | 2019-06-13 | 株式会社Sumco | Apparatus and method for manufacturing silicon single crystal |
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