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JPS5338275A - Semiconductor integrated circuit and its production - Google Patents

Semiconductor integrated circuit and its production

Info

Publication number
JPS5338275A
JPS5338275A JP11185576A JP11185576A JPS5338275A JP S5338275 A JPS5338275 A JP S5338275A JP 11185576 A JP11185576 A JP 11185576A JP 11185576 A JP11185576 A JP 11185576A JP S5338275 A JPS5338275 A JP S5338275A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
diffusing
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11185576A
Other languages
Japanese (ja)
Other versions
JPS5551342B2 (en
Inventor
Shinji Okuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11185576A priority Critical patent/JPS5338275A/en
Publication of JPS5338275A publication Critical patent/JPS5338275A/en
Publication of JPS5551342B2 publication Critical patent/JPS5551342B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Thyristors (AREA)

Abstract

PURPOSE: To achieve the increase in the scale of integration by making constricted parts in the single crystal regions encircled by the dielectric film on a poly-Si base material and diffusing an impurity therein.
COPYRIGHT: (C)1978,JPO&Japio
JP11185576A 1976-09-20 1976-09-20 Semiconductor integrated circuit and its production Granted JPS5338275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11185576A JPS5338275A (en) 1976-09-20 1976-09-20 Semiconductor integrated circuit and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11185576A JPS5338275A (en) 1976-09-20 1976-09-20 Semiconductor integrated circuit and its production

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15209181A Division JPS57111043A (en) 1981-09-28 1981-09-28 Semiconductor integrated circuit and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5338275A true JPS5338275A (en) 1978-04-08
JPS5551342B2 JPS5551342B2 (en) 1980-12-23

Family

ID=14571842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11185576A Granted JPS5338275A (en) 1976-09-20 1976-09-20 Semiconductor integrated circuit and its production

Country Status (1)

Country Link
JP (1) JPS5338275A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62284740A (en) * 1986-06-03 1987-12-10 信越ポリマ−株式会社 Fine roller screen-shaped glare-shielding sheet
JPH01111017A (en) * 1987-10-19 1989-04-27 Toho Rayon Co Ltd Activated carbon fiber and production thereof
US4889698A (en) * 1986-07-16 1989-12-26 A/S Niro Atomizer Process for removal or mercury vapor and/or vapor of noxious organic compounds and/or nitrogen oxides from flue gas from an incinerator plant
JPH02118121A (en) * 1988-10-25 1990-05-02 Osaka Gas Co Ltd Pitch-based active carbon fiber and production thereof
US5160512A (en) * 1992-01-13 1992-11-03 Cleveland State University Gas separation process
US5514356A (en) * 1993-10-01 1996-05-07 Beco Engineering Company System for the prevention of dioxin formation in combustion flue gases
US5607654A (en) * 1991-06-10 1997-03-04 Beco Engineering Company Method for minimizing environmental release of toxic compounds in the incineration of wastes

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029423U (en) * 1973-07-09 1975-04-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029423U (en) * 1973-07-09 1975-04-03

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62284740A (en) * 1986-06-03 1987-12-10 信越ポリマ−株式会社 Fine roller screen-shaped glare-shielding sheet
US4889698A (en) * 1986-07-16 1989-12-26 A/S Niro Atomizer Process for removal or mercury vapor and/or vapor of noxious organic compounds and/or nitrogen oxides from flue gas from an incinerator plant
JPH01111017A (en) * 1987-10-19 1989-04-27 Toho Rayon Co Ltd Activated carbon fiber and production thereof
JPH02118121A (en) * 1988-10-25 1990-05-02 Osaka Gas Co Ltd Pitch-based active carbon fiber and production thereof
US5607654A (en) * 1991-06-10 1997-03-04 Beco Engineering Company Method for minimizing environmental release of toxic compounds in the incineration of wastes
US5160512A (en) * 1992-01-13 1992-11-03 Cleveland State University Gas separation process
US5514356A (en) * 1993-10-01 1996-05-07 Beco Engineering Company System for the prevention of dioxin formation in combustion flue gases

Also Published As

Publication number Publication date
JPS5551342B2 (en) 1980-12-23

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