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JPS5335384A - Aligning method - Google Patents

Aligning method

Info

Publication number
JPS5335384A
JPS5335384A JP10887576A JP10887576A JPS5335384A JP S5335384 A JPS5335384 A JP S5335384A JP 10887576 A JP10887576 A JP 10887576A JP 10887576 A JP10887576 A JP 10887576A JP S5335384 A JPS5335384 A JP S5335384A
Authority
JP
Japan
Prior art keywords
effect
aligning method
multiplier
drift
suppressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10887576A
Other languages
Japanese (ja)
Other versions
JPS5535851B2 (en
Inventor
Kazuo Minowa
Hideo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10887576A priority Critical patent/JPS5335384A/en
Publication of JPS5335384A publication Critical patent/JPS5335384A/en
Publication of JPS5535851B2 publication Critical patent/JPS5535851B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To reduce position deviation amount detecting errors and achieve the improvement in control detection density by suppressing the reference point variation by the effect of drift only to the effect of a multiplier in vibration method alignment control.
COPYRIGHT: (C)1978,JPO&Japio
JP10887576A 1976-09-13 1976-09-13 Aligning method Granted JPS5335384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10887576A JPS5335384A (en) 1976-09-13 1976-09-13 Aligning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10887576A JPS5335384A (en) 1976-09-13 1976-09-13 Aligning method

Publications (2)

Publication Number Publication Date
JPS5335384A true JPS5335384A (en) 1978-04-01
JPS5535851B2 JPS5535851B2 (en) 1980-09-17

Family

ID=14495796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10887576A Granted JPS5335384A (en) 1976-09-13 1976-09-13 Aligning method

Country Status (1)

Country Link
JP (1) JPS5335384A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177225U (en) * 1986-04-23 1987-11-11
JPH0633111Y2 (en) * 1988-08-09 1994-08-31 東急工建株式会社 Pipe end connector for concrete wall / floor

Also Published As

Publication number Publication date
JPS5535851B2 (en) 1980-09-17

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