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JPS5320567A - Method of producing composite thin film parts - Google Patents

Method of producing composite thin film parts

Info

Publication number
JPS5320567A
JPS5320567A JP9484876A JP9484876A JPS5320567A JP S5320567 A JPS5320567 A JP S5320567A JP 9484876 A JP9484876 A JP 9484876A JP 9484876 A JP9484876 A JP 9484876A JP S5320567 A JPS5320567 A JP S5320567A
Authority
JP
Japan
Prior art keywords
thin film
composite thin
producing composite
film parts
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9484876A
Other languages
Japanese (ja)
Inventor
Toshio Ootani
Yasumasa Koakutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9484876A priority Critical patent/JPS5320567A/en
Publication of JPS5320567A publication Critical patent/JPS5320567A/en
Pending legal-status Critical Current

Links

Landscapes

  • Casings For Electric Apparatus (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP9484876A 1976-08-11 1976-08-11 Method of producing composite thin film parts Pending JPS5320567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9484876A JPS5320567A (en) 1976-08-11 1976-08-11 Method of producing composite thin film parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9484876A JPS5320567A (en) 1976-08-11 1976-08-11 Method of producing composite thin film parts

Publications (1)

Publication Number Publication Date
JPS5320567A true JPS5320567A (en) 1978-02-24

Family

ID=14121441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9484876A Pending JPS5320567A (en) 1976-08-11 1976-08-11 Method of producing composite thin film parts

Country Status (1)

Country Link
JP (1) JPS5320567A (en)

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