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JPS5318972A - Monitoring method of wafer positioning state by probes - Google Patents

Monitoring method of wafer positioning state by probes

Info

Publication number
JPS5318972A
JPS5318972A JP9387376A JP9387376A JPS5318972A JP S5318972 A JPS5318972 A JP S5318972A JP 9387376 A JP9387376 A JP 9387376A JP 9387376 A JP9387376 A JP 9387376A JP S5318972 A JPS5318972 A JP S5318972A
Authority
JP
Japan
Prior art keywords
probes
monitoring method
positioning state
wafer positioning
goodness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9387376A
Other languages
Japanese (ja)
Inventor
Takeshi Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9387376A priority Critical patent/JPS5318972A/en
Publication of JPS5318972A publication Critical patent/JPS5318972A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To monitor automatic positoning and the goodness or not of index feeding by providing probes which identify the goodness or not of the positioning of wafers in addition to the probes to be erected to the bonding pads of circuit elements.
COPYRIGHT: (C)1978,JPO&Japio
JP9387376A 1976-08-05 1976-08-05 Monitoring method of wafer positioning state by probes Pending JPS5318972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9387376A JPS5318972A (en) 1976-08-05 1976-08-05 Monitoring method of wafer positioning state by probes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9387376A JPS5318972A (en) 1976-08-05 1976-08-05 Monitoring method of wafer positioning state by probes

Publications (1)

Publication Number Publication Date
JPS5318972A true JPS5318972A (en) 1978-02-21

Family

ID=14094571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9387376A Pending JPS5318972A (en) 1976-08-05 1976-08-05 Monitoring method of wafer positioning state by probes

Country Status (1)

Country Link
JP (1) JPS5318972A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114349A (en) * 1980-02-15 1981-09-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Detecting method for displacement in testing stage of wafer
JPS5935442A (en) * 1982-08-24 1984-02-27 Nec Kyushu Ltd Signal system
JPS63310129A (en) * 1987-06-12 1988-12-19 Tokyo Electron Ltd Detection of tip position of probe at probing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114349A (en) * 1980-02-15 1981-09-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Detecting method for displacement in testing stage of wafer
JPS5935442A (en) * 1982-08-24 1984-02-27 Nec Kyushu Ltd Signal system
JPS63310129A (en) * 1987-06-12 1988-12-19 Tokyo Electron Ltd Detection of tip position of probe at probing device

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