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JPS53144257A - Method of producing wafer - Google Patents

Method of producing wafer

Info

Publication number
JPS53144257A
JPS53144257A JP5868077A JP5868077A JPS53144257A JP S53144257 A JPS53144257 A JP S53144257A JP 5868077 A JP5868077 A JP 5868077A JP 5868077 A JP5868077 A JP 5868077A JP S53144257 A JPS53144257 A JP S53144257A
Authority
JP
Japan
Prior art keywords
producing wafer
wafer
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5868077A
Other languages
Japanese (ja)
Inventor
Seigou Kishino
Yoshiaki Matsushita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP5868077A priority Critical patent/JPS53144257A/en
Publication of JPS53144257A publication Critical patent/JPS53144257A/en
Pending legal-status Critical Current

Links

JP5868077A 1977-05-23 1977-05-23 Method of producing wafer Pending JPS53144257A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5868077A JPS53144257A (en) 1977-05-23 1977-05-23 Method of producing wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5868077A JPS53144257A (en) 1977-05-23 1977-05-23 Method of producing wafer

Publications (1)

Publication Number Publication Date
JPS53144257A true JPS53144257A (en) 1978-12-15

Family

ID=13091272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5868077A Pending JPS53144257A (en) 1977-05-23 1977-05-23 Method of producing wafer

Country Status (1)

Country Link
JP (1) JPS53144257A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818713A (en) * 1981-07-25 1983-02-03 Nippon Kogaku Kk <Nikon> Positioning device for discoid object
JPS607167A (en) * 1983-06-25 1985-01-14 Rohm Co Ltd Manufacture of diode
JPH01113812U (en) * 1988-01-22 1989-07-31

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818713A (en) * 1981-07-25 1983-02-03 Nippon Kogaku Kk <Nikon> Positioning device for discoid object
JPS607167A (en) * 1983-06-25 1985-01-14 Rohm Co Ltd Manufacture of diode
JPH01113812U (en) * 1988-01-22 1989-07-31

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