JPS53141197A - Process for producing magnetic oxide film - Google Patents
Process for producing magnetic oxide filmInfo
- Publication number
- JPS53141197A JPS53141197A JP5585177A JP5585177A JPS53141197A JP S53141197 A JPS53141197 A JP S53141197A JP 5585177 A JP5585177 A JP 5585177A JP 5585177 A JP5585177 A JP 5585177A JP S53141197 A JPS53141197 A JP S53141197A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- producing magnetic
- magnetic oxide
- base plate
- iron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compounds Of Iron (AREA)
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Abstract
PURPOSE: To provide the subject process comprising providing a wire net between a target of iron and an iron alloy and a base plate to carry out sputtering, whereby a film of ferromagnetic oxide (ϒ-Fe2O3) having a uniform magnetic characteristic over the full surface of the base plate is obtained.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5585177A JPS53141197A (en) | 1977-05-14 | 1977-05-14 | Process for producing magnetic oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5585177A JPS53141197A (en) | 1977-05-14 | 1977-05-14 | Process for producing magnetic oxide film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53141197A true JPS53141197A (en) | 1978-12-08 |
JPS5514058B2 JPS5514058B2 (en) | 1980-04-14 |
Family
ID=13010535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5585177A Granted JPS53141197A (en) | 1977-05-14 | 1977-05-14 | Process for producing magnetic oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53141197A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56144512A (en) * | 1980-04-11 | 1981-11-10 | Tdk Corp | Manufacture of laminated inductor |
CN102409312A (en) * | 2011-11-23 | 2012-04-11 | 林嘉宏 | Low-dust fall vacuum magneto-controlled sputter coating equipment |
-
1977
- 1977-05-14 JP JP5585177A patent/JPS53141197A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56144512A (en) * | 1980-04-11 | 1981-11-10 | Tdk Corp | Manufacture of laminated inductor |
CN102409312A (en) * | 2011-11-23 | 2012-04-11 | 林嘉宏 | Low-dust fall vacuum magneto-controlled sputter coating equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS5514058B2 (en) | 1980-04-14 |
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