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JPS53130300A - Method of synthesizing silicon nitride or silicon imide - Google Patents

Method of synthesizing silicon nitride or silicon imide

Info

Publication number
JPS53130300A
JPS53130300A JP4602177A JP4602177A JPS53130300A JP S53130300 A JPS53130300 A JP S53130300A JP 4602177 A JP4602177 A JP 4602177A JP 4602177 A JP4602177 A JP 4602177A JP S53130300 A JPS53130300 A JP S53130300A
Authority
JP
Japan
Prior art keywords
silicon
imide
synthesizing
silicon nitride
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4602177A
Other languages
Japanese (ja)
Other versions
JPS612605B2 (en
Inventor
Kazumichi Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP4602177A priority Critical patent/JPS53130300A/en
Publication of JPS53130300A publication Critical patent/JPS53130300A/en
Publication of JPS612605B2 publication Critical patent/JPS612605B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/087—Compounds containing nitrogen and non-metals and optionally metals containing one or more hydrogen atoms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
JP4602177A 1977-04-20 1977-04-20 Method of synthesizing silicon nitride or silicon imide Granted JPS53130300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4602177A JPS53130300A (en) 1977-04-20 1977-04-20 Method of synthesizing silicon nitride or silicon imide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4602177A JPS53130300A (en) 1977-04-20 1977-04-20 Method of synthesizing silicon nitride or silicon imide

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4335880A Division JPS55130807A (en) 1980-04-02 1980-04-02 Manufacture of silicon nytride powder

Publications (2)

Publication Number Publication Date
JPS53130300A true JPS53130300A (en) 1978-11-14
JPS612605B2 JPS612605B2 (en) 1986-01-27

Family

ID=12735386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4602177A Granted JPS53130300A (en) 1977-04-20 1977-04-20 Method of synthesizing silicon nitride or silicon imide

Country Status (1)

Country Link
JP (1) JPS53130300A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172207A (en) * 1982-04-01 1983-10-11 Shin Etsu Chem Co Ltd Manufacture of silicon nitride
JPS59107908A (en) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd Manufacturing method of silicon nitride powder with excellent sinterability
US5470446A (en) * 1993-04-01 1995-11-28 Tioxide Specialties Limited Process for the production of silicon nitride

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5296999A (en) * 1976-01-13 1977-08-15 Tohoku Daigaku Kinzoku Zairyo Silicon nitride having ultraahigh hardness and high purity process for peparing same and apparatus therefore
JPS53118409A (en) * 1977-03-25 1978-10-16 Tokyo Shibaura Electric Co Method of manufacturing heat resistant material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1136315B (en) * 1961-07-05 1962-09-13 Kali Chemie Ag Process for the production of silicon nitrides

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5296999A (en) * 1976-01-13 1977-08-15 Tohoku Daigaku Kinzoku Zairyo Silicon nitride having ultraahigh hardness and high purity process for peparing same and apparatus therefore
JPS53118409A (en) * 1977-03-25 1978-10-16 Tokyo Shibaura Electric Co Method of manufacturing heat resistant material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172207A (en) * 1982-04-01 1983-10-11 Shin Etsu Chem Co Ltd Manufacture of silicon nitride
JPS6156161B2 (en) * 1982-04-01 1986-12-01 Shinetsu Chem Ind Co
JPS59107908A (en) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd Manufacturing method of silicon nitride powder with excellent sinterability
US5470446A (en) * 1993-04-01 1995-11-28 Tioxide Specialties Limited Process for the production of silicon nitride

Also Published As

Publication number Publication date
JPS612605B2 (en) 1986-01-27

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