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JPS53126274A - Photoetching method - Google Patents

Photoetching method

Info

Publication number
JPS53126274A
JPS53126274A JP4163177A JP4163177A JPS53126274A JP S53126274 A JPS53126274 A JP S53126274A JP 4163177 A JP4163177 A JP 4163177A JP 4163177 A JP4163177 A JP 4163177A JP S53126274 A JPS53126274 A JP S53126274A
Authority
JP
Japan
Prior art keywords
photoetching method
work
opening parts
forming patterns
make accurate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4163177A
Other languages
Japanese (ja)
Other versions
JPS579695B2 (en
Inventor
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4163177A priority Critical patent/JPS53126274A/en
Publication of JPS53126274A publication Critical patent/JPS53126274A/en
Publication of JPS579695B2 publication Critical patent/JPS579695B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To make accurate opening parts irrespective of surface undulations by beforehand forming patterns by a substance different from that of the work in performing photoetching.
COPYRIGHT: (C)1978,JPO&Japio
JP4163177A 1977-04-11 1977-04-11 Photoetching method Granted JPS53126274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4163177A JPS53126274A (en) 1977-04-11 1977-04-11 Photoetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4163177A JPS53126274A (en) 1977-04-11 1977-04-11 Photoetching method

Publications (2)

Publication Number Publication Date
JPS53126274A true JPS53126274A (en) 1978-11-04
JPS579695B2 JPS579695B2 (en) 1982-02-23

Family

ID=12613669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4163177A Granted JPS53126274A (en) 1977-04-11 1977-04-11 Photoetching method

Country Status (1)

Country Link
JP (1) JPS53126274A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008194782A (en) * 2007-02-14 2008-08-28 Aisho:Kk Pipe material supply device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008194782A (en) * 2007-02-14 2008-08-28 Aisho:Kk Pipe material supply device

Also Published As

Publication number Publication date
JPS579695B2 (en) 1982-02-23

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