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JPS53123070A - Impurity diffusing method - Google Patents

Impurity diffusing method

Info

Publication number
JPS53123070A
JPS53123070A JP3794477A JP3794477A JPS53123070A JP S53123070 A JPS53123070 A JP S53123070A JP 3794477 A JP3794477 A JP 3794477A JP 3794477 A JP3794477 A JP 3794477A JP S53123070 A JPS53123070 A JP S53123070A
Authority
JP
Japan
Prior art keywords
impurity diffusing
diffusing method
phosphoric acid
impurity
undergone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3794477A
Other languages
Japanese (ja)
Other versions
JPS5751968B2 (en
Inventor
Noritada Sato
Masahide Miyagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP3794477A priority Critical patent/JPS53123070A/en
Publication of JPS53123070A publication Critical patent/JPS53123070A/en
Publication of JPS5751968B2 publication Critical patent/JPS5751968B2/ja
Granted legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To perform controlling of the surface concentration of diffused layers by using the Si substrates which have undergone dipping in diluted phosphoric acid, as an impurity source and changing the rate of dilution of phosphoric acid.
COPYRIGHT: (C)1978,JPO&Japio
JP3794477A 1977-04-02 1977-04-02 Impurity diffusing method Granted JPS53123070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3794477A JPS53123070A (en) 1977-04-02 1977-04-02 Impurity diffusing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3794477A JPS53123070A (en) 1977-04-02 1977-04-02 Impurity diffusing method

Publications (2)

Publication Number Publication Date
JPS53123070A true JPS53123070A (en) 1978-10-27
JPS5751968B2 JPS5751968B2 (en) 1982-11-05

Family

ID=12511651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3794477A Granted JPS53123070A (en) 1977-04-02 1977-04-02 Impurity diffusing method

Country Status (1)

Country Link
JP (1) JPS53123070A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009140116A3 (en) * 2008-05-13 2010-10-21 Georgia Tech Research Corporation Solar cell spin-on based process for simultaneous diffusion and passivation
CN102560602A (en) * 2012-03-29 2012-07-11 河海大学常州校区 Solution and method for preparing nano-pore arrays on surfaces of silicon chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009140116A3 (en) * 2008-05-13 2010-10-21 Georgia Tech Research Corporation Solar cell spin-on based process for simultaneous diffusion and passivation
CN102560602A (en) * 2012-03-29 2012-07-11 河海大学常州校区 Solution and method for preparing nano-pore arrays on surfaces of silicon chip

Also Published As

Publication number Publication date
JPS5751968B2 (en) 1982-11-05

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