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JPS53116789A - Production of metal wiring paths - Google Patents

Production of metal wiring paths

Info

Publication number
JPS53116789A
JPS53116789A JP3126577A JP3126577A JPS53116789A JP S53116789 A JPS53116789 A JP S53116789A JP 3126577 A JP3126577 A JP 3126577A JP 3126577 A JP3126577 A JP 3126577A JP S53116789 A JPS53116789 A JP S53116789A
Authority
JP
Japan
Prior art keywords
metal
production
metal wiring
wiring paths
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3126577A
Other languages
Japanese (ja)
Other versions
JPS611888B2 (en
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3126577A priority Critical patent/JPS53116789A/en
Publication of JPS53116789A publication Critical patent/JPS53116789A/en
Publication of JPS611888B2 publication Critical patent/JPS611888B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To make fine wiring paths by using the metal deposited on a substrate as a spacer for lifting off plating metal with a resist film to provide current paths for plating and selectively removing the dissimilar metal with this metal at the time of multilayer wiring.
JP3126577A 1977-03-22 1977-03-22 Production of metal wiring paths Granted JPS53116789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3126577A JPS53116789A (en) 1977-03-22 1977-03-22 Production of metal wiring paths

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3126577A JPS53116789A (en) 1977-03-22 1977-03-22 Production of metal wiring paths

Publications (2)

Publication Number Publication Date
JPS53116789A true JPS53116789A (en) 1978-10-12
JPS611888B2 JPS611888B2 (en) 1986-01-21

Family

ID=12326502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3126577A Granted JPS53116789A (en) 1977-03-22 1977-03-22 Production of metal wiring paths

Country Status (1)

Country Link
JP (1) JPS53116789A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161646A (en) * 1986-12-25 1988-07-05 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161646A (en) * 1986-12-25 1988-07-05 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS611888B2 (en) 1986-01-21

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