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JPS53114690A - Thin film strain gauge convertor - Google Patents

Thin film strain gauge convertor

Info

Publication number
JPS53114690A
JPS53114690A JP2970877A JP2970877A JPS53114690A JP S53114690 A JPS53114690 A JP S53114690A JP 2970877 A JP2970877 A JP 2970877A JP 2970877 A JP2970877 A JP 2970877A JP S53114690 A JPS53114690 A JP S53114690A
Authority
JP
Japan
Prior art keywords
convertor
thin film
strain gauge
film strain
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2970877A
Other languages
Japanese (ja)
Other versions
JPS581548B2 (en
Inventor
Akira Ote
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP2970877A priority Critical patent/JPS581548B2/en
Publication of JPS53114690A publication Critical patent/JPS53114690A/en
Publication of JPS581548B2 publication Critical patent/JPS581548B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To establish a strain convertor excellent in spring and electrical performance and machining, by using a semiconductor substrate as the spring material and using a thin film metallic resistive material as a strain gauge element.
COPYRIGHT: (C)1978,JPO&Japio
JP2970877A 1977-03-17 1977-03-17 Thin film strain gauge transducer Expired JPS581548B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2970877A JPS581548B2 (en) 1977-03-17 1977-03-17 Thin film strain gauge transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2970877A JPS581548B2 (en) 1977-03-17 1977-03-17 Thin film strain gauge transducer

Publications (2)

Publication Number Publication Date
JPS53114690A true JPS53114690A (en) 1978-10-06
JPS581548B2 JPS581548B2 (en) 1983-01-11

Family

ID=12283597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2970877A Expired JPS581548B2 (en) 1977-03-17 1977-03-17 Thin film strain gauge transducer

Country Status (1)

Country Link
JP (1) JPS581548B2 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54150987A (en) * 1978-05-18 1979-11-27 Gulton Ind Inc Strain gauge transducer and method of fabricating same
JPS57128075A (en) * 1980-12-03 1982-08-09 Honeywell Inc Detector
JPS6029627A (en) * 1983-07-27 1985-02-15 Toshiba Corp Semiconductor pressure sensor
JPS60152949U (en) * 1984-03-21 1985-10-11 株式会社東海理化電機製作所 ceramic pressure sensor
JPS6187337U (en) * 1984-11-14 1986-06-07
JPS61259134A (en) * 1985-05-14 1986-11-17 Sumitomo Electric Ind Ltd Semiconductive pressure sensor
JPS6212833U (en) * 1985-07-10 1987-01-26
JPS62500737A (en) * 1984-11-07 1987-03-26 ロ−ベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング high pressure sensor
JPS62133143U (en) * 1986-02-07 1987-08-22
JPS63118628A (en) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd Adjusting method for bridge circuit of semiconductor pressure sensor
JPS63118629A (en) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd Adjusting method for bridge circuit of semiconductor pressure sensor
JPS6378229U (en) * 1986-11-10 1988-05-24
WO1992002797A1 (en) * 1990-08-07 1992-02-20 Seiko Epson Corporation Pressure sensor
WO1992002798A1 (en) * 1990-08-07 1992-02-20 Seiko Epson Corporation Pressure sensor
JP2015075422A (en) * 2013-10-10 2015-04-20 株式会社デンソー Pressure sensor
WO2018079363A1 (en) * 2016-10-25 2018-05-03 パナソニックＩｐマネジメント株式会社 Pressure sensor

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63954B2 (en) * 1978-05-18 1988-01-09 Gulton Ind Inc
JPS54150987A (en) * 1978-05-18 1979-11-27 Gulton Ind Inc Strain gauge transducer and method of fabricating same
JPH0322065B2 (en) * 1980-12-03 1991-03-26 Honeywell Inc
JPS57128075A (en) * 1980-12-03 1982-08-09 Honeywell Inc Detector
JPS6029627A (en) * 1983-07-27 1985-02-15 Toshiba Corp Semiconductor pressure sensor
JPH0426051B2 (en) * 1983-07-27 1992-05-06 Tokyo Shibaura Electric Co
JPS60152949U (en) * 1984-03-21 1985-10-11 株式会社東海理化電機製作所 ceramic pressure sensor
JPS62500737A (en) * 1984-11-07 1987-03-26 ロ−ベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング high pressure sensor
JPS6187337U (en) * 1984-11-14 1986-06-07
JPS61259134A (en) * 1985-05-14 1986-11-17 Sumitomo Electric Ind Ltd Semiconductive pressure sensor
JPS6212833U (en) * 1985-07-10 1987-01-26
JPS62133143U (en) * 1986-02-07 1987-08-22
JPS63118628A (en) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd Adjusting method for bridge circuit of semiconductor pressure sensor
JPS63118629A (en) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd Adjusting method for bridge circuit of semiconductor pressure sensor
JPS6378229U (en) * 1986-11-10 1988-05-24
WO1992002797A1 (en) * 1990-08-07 1992-02-20 Seiko Epson Corporation Pressure sensor
WO1992002798A1 (en) * 1990-08-07 1992-02-20 Seiko Epson Corporation Pressure sensor
JP2015075422A (en) * 2013-10-10 2015-04-20 株式会社デンソー Pressure sensor
WO2018079363A1 (en) * 2016-10-25 2018-05-03 パナソニックＩｐマネジメント株式会社 Pressure sensor
CN109863381A (en) * 2016-10-25 2019-06-07 松下知识产权经营株式会社 Pressure Sensor
JPWO2018079363A1 (en) * 2016-10-25 2019-09-12 パナソニックＩｐマネジメント株式会社 Pressure sensor
CN109863381B (en) * 2016-10-25 2021-12-10 松下知识产权经营株式会社 Pressure sensor
US11422043B2 (en) 2016-10-25 2022-08-23 Panasonic Intellectual Property Management Co., Ltd. Pressure sensor

Also Published As

Publication number Publication date
JPS581548B2 (en) 1983-01-11

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