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JPS53111279A - Production of metal electrodes - Google Patents

Production of metal electrodes

Info

Publication number
JPS53111279A
JPS53111279A JP2634077A JP2634077A JPS53111279A JP S53111279 A JPS53111279 A JP S53111279A JP 2634077 A JP2634077 A JP 2634077A JP 2634077 A JP2634077 A JP 2634077A JP S53111279 A JPS53111279 A JP S53111279A
Authority
JP
Japan
Prior art keywords
production
metal electrodes
avert
circuiting
windows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2634077A
Other languages
Japanese (ja)
Inventor
Norio Suzuki
Kouichi Uekuri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2634077A priority Critical patent/JPS53111279A/en
Publication of JPS53111279A publication Critical patent/JPS53111279A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To facilitate the removal of whiskers produced during lift-off process and avert the short-circuiting of the electrode patterns formed there by selectively providing window parts in the photo resist layer formed on a semiconductor substrate and beforehand providing fine undulations on the periphery of the windows.
COPYRIGHT: (C)1978,JPO&Japio
JP2634077A 1977-03-10 1977-03-10 Production of metal electrodes Pending JPS53111279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2634077A JPS53111279A (en) 1977-03-10 1977-03-10 Production of metal electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2634077A JPS53111279A (en) 1977-03-10 1977-03-10 Production of metal electrodes

Publications (1)

Publication Number Publication Date
JPS53111279A true JPS53111279A (en) 1978-09-28

Family

ID=12190698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2634077A Pending JPS53111279A (en) 1977-03-10 1977-03-10 Production of metal electrodes

Country Status (1)

Country Link
JP (1) JPS53111279A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001203406A (en) * 1999-10-28 2001-07-27 Quantum Corp Thin film device and photoresist lift-off structure
US7084001B2 (en) 2002-12-11 2006-08-01 Oki Electric Industry Co., Ltd. Method of forming film including a comb tooth patterning film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001203406A (en) * 1999-10-28 2001-07-27 Quantum Corp Thin film device and photoresist lift-off structure
US7084001B2 (en) 2002-12-11 2006-08-01 Oki Electric Industry Co., Ltd. Method of forming film including a comb tooth patterning film

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