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JPS529688A - Ion plating process - Google Patents

Ion plating process

Info

Publication number
JPS529688A
JPS529688A JP8530475A JP8530475A JPS529688A JP S529688 A JPS529688 A JP S529688A JP 8530475 A JP8530475 A JP 8530475A JP 8530475 A JP8530475 A JP 8530475A JP S529688 A JPS529688 A JP S529688A
Authority
JP
Japan
Prior art keywords
plating process
ion plating
ion
adhesion
provide high
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8530475A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
Yasuhiro Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8530475A priority Critical patent/JPS529688A/en
Publication of JPS529688A publication Critical patent/JPS529688A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:An ion planting method which can provide high metallic gloss and adhesion.
JP8530475A 1975-07-14 1975-07-14 Ion plating process Pending JPS529688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8530475A JPS529688A (en) 1975-07-14 1975-07-14 Ion plating process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8530475A JPS529688A (en) 1975-07-14 1975-07-14 Ion plating process

Publications (1)

Publication Number Publication Date
JPS529688A true JPS529688A (en) 1977-01-25

Family

ID=13854848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8530475A Pending JPS529688A (en) 1975-07-14 1975-07-14 Ion plating process

Country Status (1)

Country Link
JP (1) JPS529688A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4507189A (en) * 1980-11-06 1985-03-26 Sumitomo Electric Industries, Ltd. Process of physical vapor deposition
JPS63134558A (en) * 1986-11-21 1988-06-07 ティーディーケイ株式会社 Non-magnetic ceramics for magnetic head

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4507189A (en) * 1980-11-06 1985-03-26 Sumitomo Electric Industries, Ltd. Process of physical vapor deposition
JPS63134558A (en) * 1986-11-21 1988-06-07 ティーディーケイ株式会社 Non-magnetic ceramics for magnetic head

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