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JPS5285798A - Spattering power source device - Google Patents

Spattering power source device

Info

Publication number
JPS5285798A
JPS5285798A JP194876A JP194876A JPS5285798A JP S5285798 A JPS5285798 A JP S5285798A JP 194876 A JP194876 A JP 194876A JP 194876 A JP194876 A JP 194876A JP S5285798 A JPS5285798 A JP S5285798A
Authority
JP
Japan
Prior art keywords
power source
source device
spattering
spattering power
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP194876A
Other languages
Japanese (ja)
Other versions
JPS5628287B2 (en
Inventor
Noboru Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP194876A priority Critical patent/JPS5285798A/en
Publication of JPS5285798A publication Critical patent/JPS5285798A/en
Publication of JPS5628287B2 publication Critical patent/JPS5628287B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Control Of Voltage And Current In General (AREA)
JP194876A 1976-01-09 1976-01-09 Spattering power source device Granted JPS5285798A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP194876A JPS5285798A (en) 1976-01-09 1976-01-09 Spattering power source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP194876A JPS5285798A (en) 1976-01-09 1976-01-09 Spattering power source device

Publications (2)

Publication Number Publication Date
JPS5285798A true JPS5285798A (en) 1977-07-16
JPS5628287B2 JPS5628287B2 (en) 1981-07-01

Family

ID=11515818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP194876A Granted JPS5285798A (en) 1976-01-09 1976-01-09 Spattering power source device

Country Status (1)

Country Link
JP (1) JPS5285798A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145170A (en) * 1979-04-28 1980-11-12 Tokuda Seisakusho Ltd Arc-breaking method of direct current electric discharge unit and its circuit
JPS5680552A (en) * 1979-11-26 1981-07-01 Keikan Kin Automatic stepless speed change device
JPS5769324A (en) * 1980-10-11 1982-04-28 Daiwa Dengiyou Kk Monitor device of dc power supply
JPS57123424A (en) * 1981-01-26 1982-07-31 Toko Inc Dc power supply device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5060528U (en) * 1973-09-29 1975-06-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5060528U (en) * 1973-09-29 1975-06-04

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145170A (en) * 1979-04-28 1980-11-12 Tokuda Seisakusho Ltd Arc-breaking method of direct current electric discharge unit and its circuit
JPS5680552A (en) * 1979-11-26 1981-07-01 Keikan Kin Automatic stepless speed change device
JPS5769324A (en) * 1980-10-11 1982-04-28 Daiwa Dengiyou Kk Monitor device of dc power supply
JPS57123424A (en) * 1981-01-26 1982-07-31 Toko Inc Dc power supply device
JPH026085B2 (en) * 1981-01-26 1990-02-07 Eastern Steel

Also Published As

Publication number Publication date
JPS5628287B2 (en) 1981-07-01

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