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JPS527762A - Surface film quantity measurement method - Google Patents

Surface film quantity measurement method

Info

Publication number
JPS527762A
JPS527762A JP8413275A JP8413275A JPS527762A JP S527762 A JPS527762 A JP S527762A JP 8413275 A JP8413275 A JP 8413275A JP 8413275 A JP8413275 A JP 8413275A JP S527762 A JPS527762 A JP S527762A
Authority
JP
Japan
Prior art keywords
measurement method
surface film
quantity measurement
film quantity
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8413275A
Other languages
Japanese (ja)
Other versions
JPS5525761B2 (en
Inventor
Hiroshi Yamamoto
Shigenori Shiki
Masaki Motomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP8413275A priority Critical patent/JPS527762A/en
Publication of JPS527762A publication Critical patent/JPS527762A/en
Publication of JPS5525761B2 publication Critical patent/JPS5525761B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: A method to continuously and accurately measure film thicknesses by detecting films before or after films are being formed and correct variance in film thichness after detection by detectors arranged before and after process lines.
COPYRIGHT: (C)1977,JPO&Japio
JP8413275A 1975-07-09 1975-07-09 Surface film quantity measurement method Granted JPS527762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8413275A JPS527762A (en) 1975-07-09 1975-07-09 Surface film quantity measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8413275A JPS527762A (en) 1975-07-09 1975-07-09 Surface film quantity measurement method

Publications (2)

Publication Number Publication Date
JPS527762A true JPS527762A (en) 1977-01-21
JPS5525761B2 JPS5525761B2 (en) 1980-07-08

Family

ID=13821966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8413275A Granted JPS527762A (en) 1975-07-09 1975-07-09 Surface film quantity measurement method

Country Status (1)

Country Link
JP (1) JPS527762A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3426201A (en) * 1965-10-12 1969-02-04 Texas Instruments Inc Method and apparatus for measuring the thickness of films by means of elliptical polarization of reflected infrared radiation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3426201A (en) * 1965-10-12 1969-02-04 Texas Instruments Inc Method and apparatus for measuring the thickness of films by means of elliptical polarization of reflected infrared radiation

Also Published As

Publication number Publication date
JPS5525761B2 (en) 1980-07-08

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