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JPS5268080A - Apparatus for physical vacuum evaporation - Google Patents

Apparatus for physical vacuum evaporation

Info

Publication number
JPS5268080A
JPS5268080A JP14484975A JP14484975A JPS5268080A JP S5268080 A JPS5268080 A JP S5268080A JP 14484975 A JP14484975 A JP 14484975A JP 14484975 A JP14484975 A JP 14484975A JP S5268080 A JPS5268080 A JP S5268080A
Authority
JP
Japan
Prior art keywords
vacuum evaporation
physical vacuum
cover
vacuum
physical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14484975A
Other languages
Japanese (ja)
Inventor
Hideaki Inoue
Hiroshi Takeuchi
Hideji Kawabata
Keizo Ishiwatari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14484975A priority Critical patent/JPS5268080A/en
Publication of JPS5268080A publication Critical patent/JPS5268080A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To enable to take out the electron beam effectively by putting the electron gun in the cover and making the degree of vacuum in the caover higher than that of the vacuum vessel, together with impressing negative electric potential on the cover.
JP14484975A 1975-12-04 1975-12-04 Apparatus for physical vacuum evaporation Pending JPS5268080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14484975A JPS5268080A (en) 1975-12-04 1975-12-04 Apparatus for physical vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14484975A JPS5268080A (en) 1975-12-04 1975-12-04 Apparatus for physical vacuum evaporation

Publications (1)

Publication Number Publication Date
JPS5268080A true JPS5268080A (en) 1977-06-06

Family

ID=15371837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14484975A Pending JPS5268080A (en) 1975-12-04 1975-12-04 Apparatus for physical vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS5268080A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007031783A (en) * 2005-07-27 2007-02-08 Ulvac Japan Ltd Electron-beam irradiation device, vapor deposition apparatus and vapor deposition method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007031783A (en) * 2005-07-27 2007-02-08 Ulvac Japan Ltd Electron-beam irradiation device, vapor deposition apparatus and vapor deposition method

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