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JPS5254459A - Precisely and finely movable pedestal - Google Patents

Precisely and finely movable pedestal

Info

Publication number
JPS5254459A
JPS5254459A JP12922275A JP12922275A JPS5254459A JP S5254459 A JPS5254459 A JP S5254459A JP 12922275 A JP12922275 A JP 12922275A JP 12922275 A JP12922275 A JP 12922275A JP S5254459 A JPS5254459 A JP S5254459A
Authority
JP
Japan
Prior art keywords
precisely
movable pedestal
finely movable
pedestal
finely
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12922275A
Other languages
Japanese (ja)
Inventor
Shinji Kuniyoshi
Sumio Hosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12922275A priority Critical patent/JPS5254459A/en
Publication of JPS5254459A publication Critical patent/JPS5254459A/en
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE: To perform a highly precise positioning at a high rate by activating a voice coil and a differential transformer fixed to the opposite side of a pedestal which is guided by parallel leaf springs.
COPYRIGHT: (C)1977,JPO&Japio
JP12922275A 1975-10-29 1975-10-29 Precisely and finely movable pedestal Pending JPS5254459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12922275A JPS5254459A (en) 1975-10-29 1975-10-29 Precisely and finely movable pedestal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12922275A JPS5254459A (en) 1975-10-29 1975-10-29 Precisely and finely movable pedestal

Publications (1)

Publication Number Publication Date
JPS5254459A true JPS5254459A (en) 1977-05-02

Family

ID=15004153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12922275A Pending JPS5254459A (en) 1975-10-29 1975-10-29 Precisely and finely movable pedestal

Country Status (1)

Country Link
JP (1) JPS5254459A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816526A (en) * 1981-07-22 1983-01-31 Toshiba Corp Electron beam exposure apparatus
JPS59500302A (en) * 1982-03-23 1984-03-01 キンボ−ル，デ−ビッド・ブイ 2-axis screen vibration device
JPS59500384A (en) * 1982-03-23 1984-03-08 キンボ−ル，デ−ビッド・ブイ Vibrating device with flexible means
JPS61124915A (en) * 1984-11-21 1986-06-12 Shimadzu Corp Driving and positioning device for extremely small stage
JPS6262306U (en) * 1985-10-08 1987-04-17
JPS62108185A (en) * 1985-11-06 1987-05-19 大日本スクリ−ン製造株式会社 Movable table device
JPH03168713A (en) * 1989-11-29 1991-07-22 Fuji Photo Film Co Ltd Scanning type microscope
US11207750B2 (en) 2018-08-13 2021-12-28 Branson Ultraschall Niederlassung Der Emerson Technologies Gmbh & Co. Ohg Welding device positioning arrangement

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816526A (en) * 1981-07-22 1983-01-31 Toshiba Corp Electron beam exposure apparatus
JPS59500302A (en) * 1982-03-23 1984-03-01 キンボ−ル，デ−ビッド・ブイ 2-axis screen vibration device
JPS59500384A (en) * 1982-03-23 1984-03-08 キンボ−ル，デ−ビッド・ブイ Vibrating device with flexible means
JPS61124915A (en) * 1984-11-21 1986-06-12 Shimadzu Corp Driving and positioning device for extremely small stage
JPS6262306U (en) * 1985-10-08 1987-04-17
JPS62108185A (en) * 1985-11-06 1987-05-19 大日本スクリ−ン製造株式会社 Movable table device
JPH03168713A (en) * 1989-11-29 1991-07-22 Fuji Photo Film Co Ltd Scanning type microscope
US11207750B2 (en) 2018-08-13 2021-12-28 Branson Ultraschall Niederlassung Der Emerson Technologies Gmbh & Co. Ohg Welding device positioning arrangement

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