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JPS5244188A - Semiconductor integrated circuit and process for production of the sam e - Google Patents

Semiconductor integrated circuit and process for production of the sam e

Info

Publication number
JPS5244188A
JPS5244188A JP50119771A JP11977175A JPS5244188A JP S5244188 A JPS5244188 A JP S5244188A JP 50119771 A JP50119771 A JP 50119771A JP 11977175 A JP11977175 A JP 11977175A JP S5244188 A JPS5244188 A JP S5244188A
Authority
JP
Japan
Prior art keywords
sam
production
integrated circuit
semiconductor integrated
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50119771A
Other languages
Japanese (ja)
Inventor
Naonobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50119771A priority Critical patent/JPS5244188A/en
Publication of JPS5244188A publication Critical patent/JPS5244188A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE:To simultaneously form an n-channel MOSFET and bipolar transistor on one substrate by using anisotropic etching, and prevent impairment of their characteristics.
JP50119771A 1975-10-06 1975-10-06 Semiconductor integrated circuit and process for production of the sam e Pending JPS5244188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50119771A JPS5244188A (en) 1975-10-06 1975-10-06 Semiconductor integrated circuit and process for production of the sam e

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50119771A JPS5244188A (en) 1975-10-06 1975-10-06 Semiconductor integrated circuit and process for production of the sam e

Publications (1)

Publication Number Publication Date
JPS5244188A true JPS5244188A (en) 1977-04-06

Family

ID=14769787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50119771A Pending JPS5244188A (en) 1975-10-06 1975-10-06 Semiconductor integrated circuit and process for production of the sam e

Country Status (1)

Country Link
JP (1) JPS5244188A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143183A (en) * 1977-05-20 1978-12-13 Hitachi Ltd Semicondutor integrated circuit device and production of the same
JPS564269A (en) * 1979-06-25 1981-01-17 Hitachi Ltd Bipolar cmos semiconductor device and manufacture thereof
JPS6363478A (en) * 1986-09-03 1988-03-19 株式会社タツノ・メカトロニクス Balling area
JPH04117975A (en) * 1990-09-06 1992-04-17 Tele Syst:Yugen Bowling alley management system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143183A (en) * 1977-05-20 1978-12-13 Hitachi Ltd Semicondutor integrated circuit device and production of the same
JPS564269A (en) * 1979-06-25 1981-01-17 Hitachi Ltd Bipolar cmos semiconductor device and manufacture thereof
JPS6363478A (en) * 1986-09-03 1988-03-19 株式会社タツノ・メカトロニクス Balling area
JPH04117975A (en) * 1990-09-06 1992-04-17 Tele Syst:Yugen Bowling alley management system

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