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JPS524177A - Automatic mask aligning method - Google Patents

Automatic mask aligning method

Info

Publication number
JPS524177A
JPS524177A JP50080190A JP8019075A JPS524177A JP S524177 A JPS524177 A JP S524177A JP 50080190 A JP50080190 A JP 50080190A JP 8019075 A JP8019075 A JP 8019075A JP S524177 A JPS524177 A JP S524177A
Authority
JP
Japan
Prior art keywords
aligning method
automatic mask
mask aligning
automatic
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50080190A
Other languages
Japanese (ja)
Inventor
Taketoshi Kato
Toichi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50080190A priority Critical patent/JPS524177A/en
Publication of JPS524177A publication Critical patent/JPS524177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To automatically with a high precision align mask/by forming a key pattern in a chip pattern.
JP50080190A 1975-06-27 1975-06-27 Automatic mask aligning method Pending JPS524177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50080190A JPS524177A (en) 1975-06-27 1975-06-27 Automatic mask aligning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50080190A JPS524177A (en) 1975-06-27 1975-06-27 Automatic mask aligning method

Publications (1)

Publication Number Publication Date
JPS524177A true JPS524177A (en) 1977-01-13

Family

ID=13711446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50080190A Pending JPS524177A (en) 1975-06-27 1975-06-27 Automatic mask aligning method

Country Status (1)

Country Link
JP (1) JPS524177A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389172U (en) * 1976-12-21 1978-07-21
JPS53111280A (en) * 1977-03-10 1978-09-28 Canon Inc Mask or wafer for production of semiconductor elements and device for aligning these
JPS54118070U (en) * 1978-02-07 1979-08-18
JPS54136173A (en) * 1978-04-13 1979-10-23 Omron Tateisi Electronics Co Semiconductor device
JPS5655041A (en) * 1979-10-11 1981-05-15 Nippon Telegr & Teleph Corp <Ntt> Positioning exposure

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389172U (en) * 1976-12-21 1978-07-21
JPS53111280A (en) * 1977-03-10 1978-09-28 Canon Inc Mask or wafer for production of semiconductor elements and device for aligning these
JPS6216012B2 (en) * 1977-03-10 1987-04-10 Canon Kk
JPS54118070U (en) * 1978-02-07 1979-08-18
JPS54136173A (en) * 1978-04-13 1979-10-23 Omron Tateisi Electronics Co Semiconductor device
JPS5655041A (en) * 1979-10-11 1981-05-15 Nippon Telegr & Teleph Corp <Ntt> Positioning exposure
JPS6214935B2 (en) * 1979-10-11 1987-04-04 Nippon Telegraph & Telephone

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