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JPS5224208A - Manufacture of fine thin films - Google Patents

Manufacture of fine thin films

Info

Publication number
JPS5224208A
JPS5224208A JP10089875A JP10089875A JPS5224208A JP S5224208 A JPS5224208 A JP S5224208A JP 10089875 A JP10089875 A JP 10089875A JP 10089875 A JP10089875 A JP 10089875A JP S5224208 A JPS5224208 A JP S5224208A
Authority
JP
Japan
Prior art keywords
manufacture
thin films
fine thin
fine
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10089875A
Other languages
Japanese (ja)
Other versions
JPS554561B2 (en
Inventor
Hiroaki Yanagida
Masayuki Nagai
Norio Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP10089875A priority Critical patent/JPS5224208A/en
Publication of JPS5224208A publication Critical patent/JPS5224208A/en
Priority to US05/871,609 priority patent/US4209477A/en
Publication of JPS554561B2 publication Critical patent/JPS554561B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Producing Shaped Articles From Materials (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Inorganic Insulating Materials (AREA)
JP10089875A 1975-08-20 1975-08-20 Manufacture of fine thin films Granted JPS5224208A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10089875A JPS5224208A (en) 1975-08-20 1975-08-20 Manufacture of fine thin films
US05/871,609 US4209477A (en) 1975-08-20 1978-01-23 Process for preparing a film of densely packed structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10089875A JPS5224208A (en) 1975-08-20 1975-08-20 Manufacture of fine thin films

Publications (2)

Publication Number Publication Date
JPS5224208A true JPS5224208A (en) 1977-02-23
JPS554561B2 JPS554561B2 (en) 1980-01-31

Family

ID=14286149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10089875A Granted JPS5224208A (en) 1975-08-20 1975-08-20 Manufacture of fine thin films

Country Status (1)

Country Link
JP (1) JPS5224208A (en)

Also Published As

Publication number Publication date
JPS554561B2 (en) 1980-01-31

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