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JPS5220774A - Manufacturing method of variable capacitance element - Google Patents

Manufacturing method of variable capacitance element

Info

Publication number
JPS5220774A
JPS5220774A JP9694575A JP9694575A JPS5220774A JP S5220774 A JPS5220774 A JP S5220774A JP 9694575 A JP9694575 A JP 9694575A JP 9694575 A JP9694575 A JP 9694575A JP S5220774 A JPS5220774 A JP S5220774A
Authority
JP
Japan
Prior art keywords
manufacturing
variable capacitance
capacitance element
epitaxial
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9694575A
Other languages
Japanese (ja)
Other versions
JPS5326117B2 (en
Inventor
Toru Hara
Ikuo Niikura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9694575A priority Critical patent/JPS5220774A/en
Publication of JPS5220774A publication Critical patent/JPS5220774A/en
Publication of JPS5326117B2 publication Critical patent/JPS5326117B2/ja
Granted legal-status Critical Current

Links

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  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: Improvement of the quality factor by forming a high conductivitytype epitaxial layer on the epitaxial GaAs layer.
COPYRIGHT: (C)1977,JPO&Japio
JP9694575A 1975-08-08 1975-08-08 Manufacturing method of variable capacitance element Granted JPS5220774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9694575A JPS5220774A (en) 1975-08-08 1975-08-08 Manufacturing method of variable capacitance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9694575A JPS5220774A (en) 1975-08-08 1975-08-08 Manufacturing method of variable capacitance element

Publications (2)

Publication Number Publication Date
JPS5220774A true JPS5220774A (en) 1977-02-16
JPS5326117B2 JPS5326117B2 (en) 1978-07-31

Family

ID=14178437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9694575A Granted JPS5220774A (en) 1975-08-08 1975-08-08 Manufacturing method of variable capacitance element

Country Status (1)

Country Link
JP (1) JPS5220774A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715418U (en) * 1980-06-30 1982-01-26
EP3100587B1 (en) 2015-04-07 2020-07-08 Cell ID Pte Ltd A dc heater

Also Published As

Publication number Publication date
JPS5326117B2 (en) 1978-07-31

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