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JPS5216175A - Wafer spotting device - Google Patents

Wafer spotting device

Info

Publication number
JPS5216175A
JPS5216175A JP9188975A JP9188975A JPS5216175A JP S5216175 A JPS5216175 A JP S5216175A JP 9188975 A JP9188975 A JP 9188975A JP 9188975 A JP9188975 A JP 9188975A JP S5216175 A JPS5216175 A JP S5216175A
Authority
JP
Japan
Prior art keywords
spotting device
wafer
wafer spotting
spotting
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9188975A
Other languages
Japanese (ja)
Inventor
Akira Minoguchi
Takumi Hondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9188975A priority Critical patent/JPS5216175A/en
Publication of JPS5216175A publication Critical patent/JPS5216175A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a small size wafer spotting device with a simple mechanism in which the semiconductor wafer is rotated in the state floated over the table by air, at the same time is pressed against the spotting guide with flat side plane to determine the position.
COPYRIGHT: (C)1977,JPO&Japio
JP9188975A 1975-07-30 1975-07-30 Wafer spotting device Pending JPS5216175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9188975A JPS5216175A (en) 1975-07-30 1975-07-30 Wafer spotting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9188975A JPS5216175A (en) 1975-07-30 1975-07-30 Wafer spotting device

Publications (1)

Publication Number Publication Date
JPS5216175A true JPS5216175A (en) 1977-02-07

Family

ID=14039112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9188975A Pending JPS5216175A (en) 1975-07-30 1975-07-30 Wafer spotting device

Country Status (1)

Country Link
JP (1) JPS5216175A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4377538A (en) * 1980-07-11 1983-03-22 Aisan Industry, Co., Ltd. Variable venturi type carburetor
JPH02284040A (en) * 1989-04-25 1990-11-21 Asahi Glass Co Ltd Instrument and method for measuring mechanical strength of semiconductor wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4377538A (en) * 1980-07-11 1983-03-22 Aisan Industry, Co., Ltd. Variable venturi type carburetor
JPH02284040A (en) * 1989-04-25 1990-11-21 Asahi Glass Co Ltd Instrument and method for measuring mechanical strength of semiconductor wafer

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