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JPS52150962A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52150962A
JPS52150962A JP6801476A JP6801476A JPS52150962A JP S52150962 A JPS52150962 A JP S52150962A JP 6801476 A JP6801476 A JP 6801476A JP 6801476 A JP6801476 A JP 6801476A JP S52150962 A JPS52150962 A JP S52150962A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
film
implanting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6801476A
Other languages
Japanese (ja)
Other versions
JPS56941B2 (en
Inventor
Goji Kawakami
Hideho Saito
Koji Mizusawa
Hiroshi Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical Fujitsu Ltd
Priority to JP6801476A priority Critical patent/JPS52150962A/en
Publication of JPS52150962A publication Critical patent/JPS52150962A/en
Publication of JPS56941B2 publication Critical patent/JPS56941B2/ja
Granted legal-status Critical Current

Links

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  • Weting (AREA)

Abstract

PURPOSE: To form a clean diffused layer by forming a film whose etching solution varies from that for a substrate, on the substrate and diffusing or ion-implanting an impurity through the film.
COPYRIGHT: (C)1977,JPO&Japio
JP6801476A 1976-06-10 1976-06-10 Production of semiconductor device Granted JPS52150962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6801476A JPS52150962A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6801476A JPS52150962A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52150962A true JPS52150962A (en) 1977-12-15
JPS56941B2 JPS56941B2 (en) 1981-01-10

Family

ID=13361545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6801476A Granted JPS52150962A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52150962A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183772A (en) * 1975-01-20 1976-07-22 Matsushita Electronics Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183772A (en) * 1975-01-20 1976-07-22 Matsushita Electronics Corp

Also Published As

Publication number Publication date
JPS56941B2 (en) 1981-01-10

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