[go: up one dir, main page]

JPS52144971A - Spin coating device - Google Patents

Spin coating device

Info

Publication number
JPS52144971A
JPS52144971A JP6113376A JP6113376A JPS52144971A JP S52144971 A JPS52144971 A JP S52144971A JP 6113376 A JP6113376 A JP 6113376A JP 6113376 A JP6113376 A JP 6113376A JP S52144971 A JPS52144971 A JP S52144971A
Authority
JP
Japan
Prior art keywords
spin coating
coating device
wafer
form object
build
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6113376A
Other languages
Japanese (ja)
Inventor
Suguru Maejima
Susumu Nanko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6113376A priority Critical patent/JPS52144971A/en
Publication of JPS52144971A publication Critical patent/JPS52144971A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: A spin coating device which prevents the occurrence of build-up of a coating material at the peripheral edges of a wafer-form object at the time of forming a coating film on the wafer-form object is obtained.
COPYRIGHT: (C)1977,JPO&Japio
JP6113376A 1976-05-28 1976-05-28 Spin coating device Pending JPS52144971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6113376A JPS52144971A (en) 1976-05-28 1976-05-28 Spin coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6113376A JPS52144971A (en) 1976-05-28 1976-05-28 Spin coating device

Publications (1)

Publication Number Publication Date
JPS52144971A true JPS52144971A (en) 1977-12-02

Family

ID=13162263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6113376A Pending JPS52144971A (en) 1976-05-28 1976-05-28 Spin coating device

Country Status (1)

Country Link
JP (1) JPS52144971A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197068A (en) * 1981-05-28 1982-12-03 Oki Electric Ind Co Ltd Apparatus for coating resist
JPS59171336U (en) * 1983-04-30 1984-11-16 株式会社東芝 resist dripping nozzle
JPH0356128U (en) * 1989-10-04 1991-05-30
US5143552A (en) * 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197068A (en) * 1981-05-28 1982-12-03 Oki Electric Ind Co Ltd Apparatus for coating resist
JPS59171336U (en) * 1983-04-30 1984-11-16 株式会社東芝 resist dripping nozzle
JPH0110922Y2 (en) * 1983-04-30 1989-03-29
US5143552A (en) * 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment
JPH0356128U (en) * 1989-10-04 1991-05-30

Similar Documents

Publication Publication Date Title
JPS51111076A (en) Exposure device
JPS52112632A (en) Thermosetting resinous composition for coating
JPS5342280A (en) Composite sheet
JPS52144971A (en) Spin coating device
JPS5228926A (en) Process for film coating of medicines
JPS5296731A (en) Prophylactics and remedies of cyanomycosis
JPS5372464A (en) Method and apparatus for rotary coating
JPS522531A (en) Method for preventing wear at the surface of a phtosensitive member an d film formation at toner surface
JPS5317646A (en) Solid adhesives
JPS5362520A (en) Loading.recovery device for sheet film and the like
JPS5230844A (en) Coating roll
JPS539958A (en) Automatic incorporating apparatus for seals
JPS5318325A (en) Sheet winding equipment
JPS5211174A (en) Rotary drum type granulating machine
JPS53141342A (en) Interior coating compound for can manufacturing
JPS5338277A (en) Production of semiconductor device
JPS525269A (en) Rotary coating device
JPS52129520A (en) Antistatic method for photographic material
JPS51115789A (en) Sheet film tipe x-ray photo apparatus
JPS525268A (en) Rotary coating device
JPS5255381A (en) Photo exposure method
JPS5318965A (en) Resist coating method
JPS51140573A (en) Photo-resist coating device
JPS5381113A (en) Radiation sensitive material
JPS52123439A (en) Bar coating and wire bar