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JPS52137283A - Storage targent - Google Patents

Storage targent

Info

Publication number
JPS52137283A
JPS52137283A JP5316376A JP5316376A JPS52137283A JP S52137283 A JPS52137283 A JP S52137283A JP 5316376 A JP5316376 A JP 5316376A JP 5316376 A JP5316376 A JP 5316376A JP S52137283 A JPS52137283 A JP S52137283A
Authority
JP
Japan
Prior art keywords
targent
storage
substrate
surface potential
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5316376A
Other languages
Japanese (ja)
Inventor
Teruhide Nishikawa
Kitaro Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5316376A priority Critical patent/JPS52137283A/en
Publication of JPS52137283A publication Critical patent/JPS52137283A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To avoid seizing by independently changing the surface potential of a target relative to the target voltage of a substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP5316376A 1976-05-12 1976-05-12 Storage targent Pending JPS52137283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5316376A JPS52137283A (en) 1976-05-12 1976-05-12 Storage targent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5316376A JPS52137283A (en) 1976-05-12 1976-05-12 Storage targent

Publications (1)

Publication Number Publication Date
JPS52137283A true JPS52137283A (en) 1977-11-16

Family

ID=12935173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5316376A Pending JPS52137283A (en) 1976-05-12 1976-05-12 Storage targent

Country Status (1)

Country Link
JP (1) JPS52137283A (en)

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