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JPS52131791A - Gas detecting element - Google Patents

Gas detecting element

Info

Publication number
JPS52131791A
JPS52131791A JP4874276A JP4874276A JPS52131791A JP S52131791 A JPS52131791 A JP S52131791A JP 4874276 A JP4874276 A JP 4874276A JP 4874276 A JP4874276 A JP 4874276A JP S52131791 A JPS52131791 A JP S52131791A
Authority
JP
Japan
Prior art keywords
detecting element
gas detecting
gas
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4874276A
Other languages
Japanese (ja)
Inventor
Osafumi Mozume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP4874276A priority Critical patent/JPS52131791A/en
Publication of JPS52131791A publication Critical patent/JPS52131791A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP4874276A 1976-04-28 1976-04-28 Gas detecting element Pending JPS52131791A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4874276A JPS52131791A (en) 1976-04-28 1976-04-28 Gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4874276A JPS52131791A (en) 1976-04-28 1976-04-28 Gas detecting element

Publications (1)

Publication Number Publication Date
JPS52131791A true JPS52131791A (en) 1977-11-04

Family

ID=12811729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4874276A Pending JPS52131791A (en) 1976-04-28 1976-04-28 Gas detecting element

Country Status (1)

Country Link
JP (1) JPS52131791A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527952A (en) * 1978-08-18 1980-02-28 Matsushita Electric Ind Co Ltd Semiconductor detector
JPS5529758A (en) * 1978-08-23 1980-03-03 Matsushita Electric Ind Co Ltd Detector employing extremely-fine corpuscule resist film
JPS6110756A (en) * 1984-06-25 1986-01-18 Shinei Kk Gas sensor manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017287A (en) * 1973-06-12 1975-02-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017287A (en) * 1973-06-12 1975-02-24

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527952A (en) * 1978-08-18 1980-02-28 Matsushita Electric Ind Co Ltd Semiconductor detector
JPS5942826B2 (en) * 1978-08-18 1984-10-17 松下電器産業株式会社 gas detection device
JPS5529758A (en) * 1978-08-23 1980-03-03 Matsushita Electric Ind Co Ltd Detector employing extremely-fine corpuscule resist film
JPS6222096B2 (en) * 1978-08-23 1987-05-15 Matsushita Electric Ind Co Ltd
JPS6110756A (en) * 1984-06-25 1986-01-18 Shinei Kk Gas sensor manufacturing method
JPH0418261B2 (en) * 1984-06-25 1992-03-27 Shinei Kk

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