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JPS52127621A - Valve for controlling flow quantity of fluid - Google Patents

Valve for controlling flow quantity of fluid

Info

Publication number
JPS52127621A
JPS52127621A JP4454576A JP4454576A JPS52127621A JP S52127621 A JPS52127621 A JP S52127621A JP 4454576 A JP4454576 A JP 4454576A JP 4454576 A JP4454576 A JP 4454576A JP S52127621 A JPS52127621 A JP S52127621A
Authority
JP
Japan
Prior art keywords
fluid
valve
controlling flow
flow quantity
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4454576A
Other languages
Japanese (ja)
Other versions
JPS6046307B2 (en
Inventor
Keiichi Mori
Yasukiyo Ueda
Keijirou Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4454576A priority Critical patent/JPS6046307B2/en
Publication of JPS52127621A publication Critical patent/JPS52127621A/en
Publication of JPS6046307B2 publication Critical patent/JPS6046307B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP4454576A 1976-04-19 1976-04-19 fluid flow control valve Expired JPS6046307B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4454576A JPS6046307B2 (en) 1976-04-19 1976-04-19 fluid flow control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4454576A JPS6046307B2 (en) 1976-04-19 1976-04-19 fluid flow control valve

Publications (2)

Publication Number Publication Date
JPS52127621A true JPS52127621A (en) 1977-10-26
JPS6046307B2 JPS6046307B2 (en) 1985-10-15

Family

ID=12694464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4454576A Expired JPS6046307B2 (en) 1976-04-19 1976-04-19 fluid flow control valve

Country Status (1)

Country Link
JP (1) JPS6046307B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461320U (en) * 1977-10-07 1979-04-27
JPS5971971A (en) * 1983-09-14 1984-04-23 株式会社日立製作所 Damper opening/closing control device
JPH03270785A (en) * 1990-03-20 1991-12-02 Ebisu Yakuhin Kako Kk Apparatus for continuously charging powdery or granular chemical agent
WO2020003795A1 (en) * 2018-06-29 2020-01-02 株式会社Ｓｃｒｅｅｎホールディングス Opening/closing valve and substrate processing device provided with said opening/closing valve

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461320U (en) * 1977-10-07 1979-04-27
JPS5971971A (en) * 1983-09-14 1984-04-23 株式会社日立製作所 Damper opening/closing control device
JPH03270785A (en) * 1990-03-20 1991-12-02 Ebisu Yakuhin Kako Kk Apparatus for continuously charging powdery or granular chemical agent
WO2020003795A1 (en) * 2018-06-29 2020-01-02 株式会社Ｓｃｒｅｅｎホールディングス Opening/closing valve and substrate processing device provided with said opening/closing valve

Also Published As

Publication number Publication date
JPS6046307B2 (en) 1985-10-15

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