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JPS52117659A - Diameter measuring device - Google Patents

Diameter measuring device

Info

Publication number
JPS52117659A
JPS52117659A JP3494476A JP3494476A JPS52117659A JP S52117659 A JPS52117659 A JP S52117659A JP 3494476 A JP3494476 A JP 3494476A JP 3494476 A JP3494476 A JP 3494476A JP S52117659 A JPS52117659 A JP S52117659A
Authority
JP
Japan
Prior art keywords
measuring device
diameter measuring
diamter
abbe
principle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3494476A
Other languages
Japanese (ja)
Other versions
JPS5618085B2 (en
Inventor
Michihiro Shidara
Nobutoku Higuchi
Katsuyoshi Onuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3494476A priority Critical patent/JPS52117659A/en
Publication of JPS52117659A publication Critical patent/JPS52117659A/en
Publication of JPS5618085B2 publication Critical patent/JPS5618085B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To precisely measure the diamter of a large test piece by using both a laser interferometer for measurement of length and measuring means following the Abbe's principle.
COPYRIGHT: (C)1977,JPO&Japio
JP3494476A 1976-03-29 1976-03-29 Diameter measuring device Granted JPS52117659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3494476A JPS52117659A (en) 1976-03-29 1976-03-29 Diameter measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3494476A JPS52117659A (en) 1976-03-29 1976-03-29 Diameter measuring device

Publications (2)

Publication Number Publication Date
JPS52117659A true JPS52117659A (en) 1977-10-03
JPS5618085B2 JPS5618085B2 (en) 1981-04-27

Family

ID=12428273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3494476A Granted JPS52117659A (en) 1976-03-29 1976-03-29 Diameter measuring device

Country Status (1)

Country Link
JP (1) JPS52117659A (en)

Also Published As

Publication number Publication date
JPS5618085B2 (en) 1981-04-27

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