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JPS52115163A - Scan type electronic microscope - Google Patents

Scan type electronic microscope

Info

Publication number
JPS52115163A
JPS52115163A JP3130376A JP3130376A JPS52115163A JP S52115163 A JPS52115163 A JP S52115163A JP 3130376 A JP3130376 A JP 3130376A JP 3130376 A JP3130376 A JP 3130376A JP S52115163 A JPS52115163 A JP S52115163A
Authority
JP
Japan
Prior art keywords
type electronic
scan type
electronic microscope
sample
judgement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3130376A
Other languages
Japanese (ja)
Inventor
Kimio Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3130376A priority Critical patent/JPS52115163A/en
Publication of JPS52115163A publication Critical patent/JPS52115163A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate the preparation of continuous photography and judgement of sample characteristics by taking a photography, by displaying the position of sample together with the image on a braun tube, thereby facilitating the judgement of observation section of the sample.
COPYRIGHT: (C)1977,JPO&Japio
JP3130376A 1976-03-24 1976-03-24 Scan type electronic microscope Pending JPS52115163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3130376A JPS52115163A (en) 1976-03-24 1976-03-24 Scan type electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3130376A JPS52115163A (en) 1976-03-24 1976-03-24 Scan type electronic microscope

Publications (1)

Publication Number Publication Date
JPS52115163A true JPS52115163A (en) 1977-09-27

Family

ID=12327514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3130376A Pending JPS52115163A (en) 1976-03-24 1976-03-24 Scan type electronic microscope

Country Status (1)

Country Link
JP (1) JPS52115163A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626347A (en) * 1979-08-08 1981-03-13 Hitachi Ltd Displayer for sample-viewing position in electron microscope, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626347A (en) * 1979-08-08 1981-03-13 Hitachi Ltd Displayer for sample-viewing position in electron microscope, etc.

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