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JPS52109878A - Observing method of electron beam image - Google Patents

Observing method of electron beam image

Info

Publication number
JPS52109878A
JPS52109878A JP2637376A JP2637376A JPS52109878A JP S52109878 A JPS52109878 A JP S52109878A JP 2637376 A JP2637376 A JP 2637376A JP 2637376 A JP2637376 A JP 2637376A JP S52109878 A JPS52109878 A JP S52109878A
Authority
JP
Japan
Prior art keywords
electron beam
beam image
observing method
observing
deforcus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2637376A
Other languages
Japanese (ja)
Inventor
Shinji Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2637376A priority Critical patent/JPS52109878A/en
Publication of JPS52109878A publication Critical patent/JPS52109878A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To improve the manufacturing accuracy for graph and efficiency by electron beam, by displaying the deflecting distortion, deforcus, and flying spot produced when the electron beam is deflected and by correcting this.
COPYRIGHT: (C)1977,JPO&Japio
JP2637376A 1976-03-11 1976-03-11 Observing method of electron beam image Pending JPS52109878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2637376A JPS52109878A (en) 1976-03-11 1976-03-11 Observing method of electron beam image

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2637376A JPS52109878A (en) 1976-03-11 1976-03-11 Observing method of electron beam image

Publications (1)

Publication Number Publication Date
JPS52109878A true JPS52109878A (en) 1977-09-14

Family

ID=12191697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2637376A Pending JPS52109878A (en) 1976-03-11 1976-03-11 Observing method of electron beam image

Country Status (1)

Country Link
JP (1) JPS52109878A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002365247A (en) * 2001-06-07 2002-12-18 Shimadzu Corp Observation image controller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002365247A (en) * 2001-06-07 2002-12-18 Shimadzu Corp Observation image controller

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