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JPS52109857A - Transparent type electronic microscope - Google Patents

Transparent type electronic microscope

Info

Publication number
JPS52109857A
JPS52109857A JP2619976A JP2619976A JPS52109857A JP S52109857 A JPS52109857 A JP S52109857A JP 2619976 A JP2619976 A JP 2619976A JP 2619976 A JP2619976 A JP 2619976A JP S52109857 A JPS52109857 A JP S52109857A
Authority
JP
Japan
Prior art keywords
type electronic
electronic microscope
transparent type
magnetic pole
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2619976A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2619976A priority Critical patent/JPS52109857A/en
Publication of JPS52109857A publication Critical patent/JPS52109857A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the use of acceleration voltages more than two types without exchanging the magnetic lens, by mounting the short lenses more than two operationable from outside the vacuum on the external circumference of the parallel three magnetic pole permanent magnet lens which is made smaller for the magnetic pole hole sequentially from the first magnetic pole.
COPYRIGHT: (C)1977,JPO&Japio
JP2619976A 1976-03-12 1976-03-12 Transparent type electronic microscope Pending JPS52109857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2619976A JPS52109857A (en) 1976-03-12 1976-03-12 Transparent type electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2619976A JPS52109857A (en) 1976-03-12 1976-03-12 Transparent type electronic microscope

Publications (1)

Publication Number Publication Date
JPS52109857A true JPS52109857A (en) 1977-09-14

Family

ID=12186799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2619976A Pending JPS52109857A (en) 1976-03-12 1976-03-12 Transparent type electronic microscope

Country Status (1)

Country Link
JP (1) JPS52109857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311117A (en) * 2006-05-17 2007-11-29 Hitachi High-Technologies Corp Electron lens and charged particle beam apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311117A (en) * 2006-05-17 2007-11-29 Hitachi High-Technologies Corp Electron lens and charged particle beam apparatus using the same

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